Sensing property of self-sensitive piezoelectric microcantilever utilizing Pb(Zr_0.52/Ti_0.48)O₃ thin film and LaNiO ₃ oxide electrode

In the present study, we describe the influence of LaNiO₃ (LNO) oxide electrodes on the sensing property of self-sensitive piezoelectric microcantilevers using Pb(Zr_0.52/Ti_0.48)O₃ (PZT) thin films as a sensor and an actuator. Microcantilevers with and without LNO thin films were fabricated through microelectromchanical systems (MEMS) microfabrication process. The transverse piezoelectric constant d₃₁ of the PZT thin films with LNO thin films was determined to be -120pm/V, while those without LNO thin films was determined to be -80 pm/V. In spite of the higher piezoelectric constant, the sensor output of the self-sensitive cantilevers with LNO thin films is only about 1/5 of those without LNO thin films. The result will be discussed in relation to the dielectric loss of the PZT thin films.