Room-temperature bonding of lithium niobate on single crystal diamond wafer

Jiao Fu; Kang Wang; Fengnan Li; Daming Chen; Yifei Zhou; Qin Lu; Hongxing Wang

doi:10.1016/j.vacuum.2024.113985

Room-temperature bonding of lithium niobate on single crystal diamond wafer

Jiao Fu
, Kang Wang
, Fengnan Li
, Daming Chen
, Yifei Zhou
, Qin Lu
, Hongxing Wang

Faculty of Electronic and Information Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Lithium niobate (LiNbO₃) is a novel inorganic material, widely applicated in optical waveguides, mobile, piezoelectric sensors and optical modulators. Whereas, the properties of LiNbO₃ will be degraded dramatically at high-power due to its low thermal conductivity. This paper focuses on the room temperature direct bonding of LiNbO₃ to a single crystal diamond (SCD) wafer using a nano-adhesive Mo/Au interlayers. The bonding quality was evaluated by scanning acoustic microscopy, transmission electron microscopy, and tensile testing. The results showed a void-free bonded interface at atomic level, with a tensile strength of approximately 18 MPa. This method could enhance the high-power applications of LiNbO₃ devices.

Original language	English
Article number	113985
Journal	Vacuum
Volume	233
DOIs	https://doi.org/10.1016/j.vacuum.2024.113985
State	Published - Mar 2025

Keywords

High-resolution transmission electron microscopy
Lithium niobate
Room temperature bonding
Single crystal diamond

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10.1016/j.vacuum.2024.113985

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title = "Room-temperature bonding of lithium niobate on single crystal diamond wafer",

abstract = "Lithium niobate (LiNbO3) is a novel inorganic material, widely applicated in optical waveguides, mobile, piezoelectric sensors and optical modulators. Whereas, the properties of LiNbO3 will be degraded dramatically at high-power due to its low thermal conductivity. This paper focuses on the room temperature direct bonding of LiNbO3 to a single crystal diamond (SCD) wafer using a nano-adhesive Mo/Au interlayers. The bonding quality was evaluated by scanning acoustic microscopy, transmission electron microscopy, and tensile testing. The results showed a void-free bonded interface at atomic level, with a tensile strength of approximately 18 MPa. This method could enhance the high-power applications of LiNbO3 devices.",

keywords = "High-resolution transmission electron microscopy, Lithium niobate, Room temperature bonding, Single crystal diamond",

author = "Jiao Fu and Kang Wang and Fengnan Li and Daming Chen and Yifei Zhou and Qin Lu and Hongxing Wang",

note = "Publisher Copyright: {\textcopyright} 2024",

year = "2025",

month = mar,

doi = "10.1016/j.vacuum.2024.113985",

language = "英语",

volume = "233",

journal = "Vacuum",

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TY - JOUR

T1 - Room-temperature bonding of lithium niobate on single crystal diamond wafer

AU - Fu, Jiao

AU - Wang, Kang

AU - Li, Fengnan

AU - Chen, Daming

AU - Zhou, Yifei

AU - Lu, Qin

AU - Wang, Hongxing

PY - 2025/3

Y1 - 2025/3

N2 - Lithium niobate (LiNbO3) is a novel inorganic material, widely applicated in optical waveguides, mobile, piezoelectric sensors and optical modulators. Whereas, the properties of LiNbO3 will be degraded dramatically at high-power due to its low thermal conductivity. This paper focuses on the room temperature direct bonding of LiNbO3 to a single crystal diamond (SCD) wafer using a nano-adhesive Mo/Au interlayers. The bonding quality was evaluated by scanning acoustic microscopy, transmission electron microscopy, and tensile testing. The results showed a void-free bonded interface at atomic level, with a tensile strength of approximately 18 MPa. This method could enhance the high-power applications of LiNbO3 devices.

AB - Lithium niobate (LiNbO3) is a novel inorganic material, widely applicated in optical waveguides, mobile, piezoelectric sensors and optical modulators. Whereas, the properties of LiNbO3 will be degraded dramatically at high-power due to its low thermal conductivity. This paper focuses on the room temperature direct bonding of LiNbO3 to a single crystal diamond (SCD) wafer using a nano-adhesive Mo/Au interlayers. The bonding quality was evaluated by scanning acoustic microscopy, transmission electron microscopy, and tensile testing. The results showed a void-free bonded interface at atomic level, with a tensile strength of approximately 18 MPa. This method could enhance the high-power applications of LiNbO3 devices.

KW - High-resolution transmission electron microscopy

KW - Lithium niobate

KW - Room temperature bonding

KW - Single crystal diamond

UR - https://www.scopus.com/pages/publications/85213827489

U2 - 10.1016/j.vacuum.2024.113985

DO - 10.1016/j.vacuum.2024.113985

M3 - 文章

AN - SCOPUS:85213827489

SN - 0042-207X

VL - 233

JO - Vacuum

JF - Vacuum

M1 - 113985

ER -

Room-temperature bonding of lithium niobate on single crystal diamond wafer

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