Research review of the NSFC major research plan "Fundamental Research on Nanomanufacturing"

National Natural Science Foundation of China major research plan "Fundamental Research on Nanomanufacturing" focuses on the frontiers of fundamental research on nanoprecision manufacturing, nanoscale manufacturing, and multi-scale manufacturing to meet the key strategic needs of the national development, explore the basic laws of nanomanufacturing processing, develop novel nano-manufacturing techniques and equipment mechanisms, and to provide a theoretical basis for nano-manufacturing repeatability and volume production. The application and funding information and management measures during the 6 implement years have been introduced. The significant effects obtained in aspects of crosses and integration between disciplines, sharing of the scientific and research instruments and basic experimental technologies have been reviewed. Original research achievements and outstanding progresses in the fields of optic free surface polishing, wafer planarization and thinning, nano-cutting, electro-assisted nanoimprint lithography, ultra-short laser pulse nanofabrication and microelectronics device manufacturing are summarizes. At the same time, the backgrounds, scientific objectives and key issues of the four integrated projects integrated based on the achievements of the major research plan have also been briefly introduced.