Research of the high temperature pressure sensor technology

Yulong Zhao; Libo Zhao; Zhuangde Jiang

doi:10.3901/jme.2002.supp.070

Research of the high temperature pressure sensor technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The high temperature pressure sensor based on the micro electromechanical system (MEMS) technology, which takes use of the high temperature SOI sensitive element and the girder-film combined design, is designed. It possesses the higher frequency response and is able to endure high and instantaneous ultrahigh temperature. The sensor is used in checking and measuring the pressure in the harsh environment beyond 0-220°C, and is able to endure 1000°C instantaneous impact. The structure model and testing data are supplied, and the results are satisfying.

Original language	English
Pages (from-to)	70-72
Number of pages	3
Journal	Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
Volume	38
Issue number	SUPPL.
DOIs	https://doi.org/10.3901/jme.2002.supp.070
State	Published - Dec 2002

Keywords

Girder-film combined design
High temperature pressure sensor
Instantaneous impact

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10.3901/jme.2002.supp.070

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title = "Research of the high temperature pressure sensor technology",

abstract = "The high temperature pressure sensor based on the micro electromechanical system (MEMS) technology, which takes use of the high temperature SOI sensitive element and the girder-film combined design, is designed. It possesses the higher frequency response and is able to endure high and instantaneous ultrahigh temperature. The sensor is used in checking and measuring the pressure in the harsh environment beyond 0-220°C, and is able to endure 1000°C instantaneous impact. The structure model and testing data are supplied, and the results are satisfying.",

keywords = "Girder-film combined design, High temperature pressure sensor, Instantaneous impact",

author = "Yulong Zhao and Libo Zhao and Zhuangde Jiang",

year = "2002",

month = dec,

doi = "10.3901/jme.2002.supp.070",

language = "英语",

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pages = "70--72",

journal = "Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering",

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AU - Zhao, Libo

AU - Jiang, Zhuangde

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N2 - The high temperature pressure sensor based on the micro electromechanical system (MEMS) technology, which takes use of the high temperature SOI sensitive element and the girder-film combined design, is designed. It possesses the higher frequency response and is able to endure high and instantaneous ultrahigh temperature. The sensor is used in checking and measuring the pressure in the harsh environment beyond 0-220°C, and is able to endure 1000°C instantaneous impact. The structure model and testing data are supplied, and the results are satisfying.

AB - The high temperature pressure sensor based on the micro electromechanical system (MEMS) technology, which takes use of the high temperature SOI sensitive element and the girder-film combined design, is designed. It possesses the higher frequency response and is able to endure high and instantaneous ultrahigh temperature. The sensor is used in checking and measuring the pressure in the harsh environment beyond 0-220°C, and is able to endure 1000°C instantaneous impact. The structure model and testing data are supplied, and the results are satisfying.

KW - Girder-film combined design

KW - High temperature pressure sensor

KW - Instantaneous impact

UR - https://www.scopus.com/pages/publications/0141819339

U2 - 10.3901/jme.2002.supp.070

DO - 10.3901/jme.2002.supp.070

M3 - 文章

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SN - 0577-6686

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JO - Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

JF - Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

IS - SUPPL.

ER -

Research of the high temperature pressure sensor technology

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Keywords

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