@inproceedings{3ea36be025f44cd4be6379705198cb1e,
title = "Reduction of machining motion error of an aspheric surface coordinate measuring machine by a new error compensation method",
abstract = "This paper suggests a new method to reduce the machine motion errors of a 2-dimension aspheric surface measuring. Using the laser interferometer to measure the site error of each point instead of the position error, straightness error and yaw and pitch error. Through error compensation of the new method, the simulation results and verification experiments showed that the site errors agree well within less than 5μm in the whole space. The new mathematical model, the calibration method and the data analysis method are described in detail in the paper.",
keywords = "coordinate measuring machine(CMM), error compensation, error curve surface",
author = "Xiang Wei and Bing Li and Lijiao Jia and Zhuangde Jiang and Lei Chen",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 ; Conference date: 13-04-2014 Through 16-04-2014",
year = "2014",
month = sep,
day = "23",
doi = "10.1109/NEMS.2014.6908767",
language = "英语",
series = "9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "93--96",
booktitle = "9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014",
}