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Reduction of machining motion error of an aspheric surface coordinate measuring machine by a new error compensation method

  • Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper suggests a new method to reduce the machine motion errors of a 2-dimension aspheric surface measuring. Using the laser interferometer to measure the site error of each point instead of the position error, straightness error and yaw and pitch error. Through error compensation of the new method, the simulation results and verification experiments showed that the site errors agree well within less than 5μm in the whole space. The new mathematical model, the calibration method and the data analysis method are described in detail in the paper.

Original languageEnglish
Title of host publication9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages93-96
Number of pages4
ISBN (Electronic)9781479947270
DOIs
StatePublished - 23 Sep 2014
Event9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States
Duration: 13 Apr 201416 Apr 2014

Publication series

Name9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Conference

Conference9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
Country/TerritoryUnited States
CityWaikiki Beach
Period13/04/1416/04/14

Keywords

  • coordinate measuring machine(CMM)
  • error compensation
  • error curve surface

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