Realizing controllable and efficient ozone synthesis via a dual-sided surface discharge system with inductance matching

Realizing highly efficient ozone (O₃) synthesis without compromising energy utilization remains a critical challenge in plasma-based gas processing. In response, this study presents a synergistic optimization strategy employing a novel dual-sided surface dielectric barrier discharge (D-SDBD) reactor combined with external inductor impedance matching, aiming to guide reactor optimization and deepen insights into the O₃ formation mechanisms. The electrode configuration of D-SDBD extends the plasma activation zone, nearly doubling O₃ production compared to conventional single-sided designs without sacrificing energy efficiency. Leveraging the structural innovation, the systematic parametric investigation identifies optimal operating voltage conditions (7 kV, 15 kHz), yielding a 38% rise in energy efficiency and a 9% increase in production rate. Furthermore, by compensating SDBD’s inherent capacitive characteristics, a 500 μH inductor is selected through comparative analysis to drive the circuit toward electrical resonance. This optimization improves the power factor and enhances the electron collision dynamics in plasma, achieving simultaneous gains of 21% in production rate and 13% in energy efficiency. To mechanistically elucidate the regulating role of this research on O₃ formation, the reduced electric field (E/N) is demonstrated to be the core physical parameter governing electron energy distribution and directing reaction pathways, with an optimal E/N window of 210–240 Td for controlled and efficient O₃ synthesis. Overall, these findings demonstrate that the synergistic combination of dual-sided structural innovation and circuit-level impedance matching provides a robust framework for highly efficient plasma-based O₃ generation.