Abstract
Numerical analysis of laser chemical vapor deposition (LCVD) of Titanium Nitride by a moving laser beam is investigated numerically. The effect of natural convection due to temperature and concentration differences in the gases mixture is modeled and implemented into the thermal model of LCVD by a moving laser beam. The problem is formulated in the coordinate system that moves with the laser beam. The results show that the effect of natural convection on the shape of deposited film is very insignificant for cases with lower laser power but it becomes important when the laser power is increased.
| Original language | English |
|---|---|
| Pages (from-to) | 33-44 |
| Number of pages | 12 |
| Journal | American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD |
| Volume | 372 |
| Issue number | 5 |
| DOIs | |
| State | Published - 2002 |
| Externally published | Yes |
| Event | 2002 ASME International Mechanical Engineering Congress and Exposition - New Orleans, LA, United States Duration: 17 Nov 2002 → 22 Nov 2002 |
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