Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

Jian Lu; Tsuyoshi Ikehara; Takeshi Kobayashi; Ryutaro Maeda; Takashi Mihara

doi:10.1007/s00542-006-0272-2

Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

Jian Lu
, Tsuyoshi Ikehara
, Takeshi Kobayashi
, Ryutaro Maeda
, Takashi Mihara

National Institute of Advanced Industrial Science and Technology
Olympus Corporation

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

The quality factors (Q-factor) of micro cantilevers transduced by piezoelectric lead zirconate titanate (PZT) film under atmospheric pressure conditions were investigated and discussed. It was found that Q-factors increased with thicker PZT film. Due to air damping, shorter cantilevers resulted in preferred larger Q-factors. The Q-factor was found to be as high as 450 for a 150-μm long PZT cantilever when using 1.04-μm thick PZT film as the electromechanical conversion medium. Differences in the measured Q-factors when using integrated PZT film self-excitation and external PZT vibrator actuation indicate that energy dissipation induced by the electromechanical coupling in PZT thin films was noteworthy even under atmospheric pressure conditions. Moreover, the mechanical properties of the PZT film were found contribute significantly to decreases of the Q-factor.

Original language	English
Pages (from-to)	1517-1522
Number of pages	6
Journal	Microsystem Technologies
Volume	13
Issue number	11-12
DOIs	https://doi.org/10.1007/s00542-006-0272-2
State	Published - Jul 2007
Externally published	Yes

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title = "Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film",

abstract = "The quality factors (Q-factor) of micro cantilevers transduced by piezoelectric lead zirconate titanate (PZT) film under atmospheric pressure conditions were investigated and discussed. It was found that Q-factors increased with thicker PZT film. Due to air damping, shorter cantilevers resulted in preferred larger Q-factors. The Q-factor was found to be as high as 450 for a 150-μm long PZT cantilever when using 1.04-μm thick PZT film as the electromechanical conversion medium. Differences in the measured Q-factors when using integrated PZT film self-excitation and external PZT vibrator actuation indicate that energy dissipation induced by the electromechanical coupling in PZT thin films was noteworthy even under atmospheric pressure conditions. Moreover, the mechanical properties of the PZT film were found contribute significantly to decreases of the Q-factor.",

author = "Jian Lu and Tsuyoshi Ikehara and Takeshi Kobayashi and Ryutaro Maeda and Takashi Mihara",

year = "2007",

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doi = "10.1007/s00542-006-0272-2",

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T1 - Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

AU - Lu, Jian

AU - Ikehara, Tsuyoshi

AU - Kobayashi, Takeshi

AU - Maeda, Ryutaro

AU - Mihara, Takashi

PY - 2007/7

Y1 - 2007/7

N2 - The quality factors (Q-factor) of micro cantilevers transduced by piezoelectric lead zirconate titanate (PZT) film under atmospheric pressure conditions were investigated and discussed. It was found that Q-factors increased with thicker PZT film. Due to air damping, shorter cantilevers resulted in preferred larger Q-factors. The Q-factor was found to be as high as 450 for a 150-μm long PZT cantilever when using 1.04-μm thick PZT film as the electromechanical conversion medium. Differences in the measured Q-factors when using integrated PZT film self-excitation and external PZT vibrator actuation indicate that energy dissipation induced by the electromechanical coupling in PZT thin films was noteworthy even under atmospheric pressure conditions. Moreover, the mechanical properties of the PZT film were found contribute significantly to decreases of the Q-factor.

AB - The quality factors (Q-factor) of micro cantilevers transduced by piezoelectric lead zirconate titanate (PZT) film under atmospheric pressure conditions were investigated and discussed. It was found that Q-factors increased with thicker PZT film. Due to air damping, shorter cantilevers resulted in preferred larger Q-factors. The Q-factor was found to be as high as 450 for a 150-μm long PZT cantilever when using 1.04-μm thick PZT film as the electromechanical conversion medium. Differences in the measured Q-factors when using integrated PZT film self-excitation and external PZT vibrator actuation indicate that energy dissipation induced by the electromechanical coupling in PZT thin films was noteworthy even under atmospheric pressure conditions. Moreover, the mechanical properties of the PZT film were found contribute significantly to decreases of the Q-factor.

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DO - 10.1007/s00542-006-0272-2

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SP - 1517

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JF - Microsystem Technologies

IS - 11-12

ER -

Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

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