PZT Film Formation with Use of Spray Coating Method

Masaaki Ichiki; Lulu Zhang; Zhen Yang; Tsuyoshi Ikehara; Ryutaro Maeda

doi:10.1541/ieejsmas.123.588

PZT Film Formation with Use of Spray Coating Method

Masaaki Ichiki
, Lulu Zhang
, Zhen Yang
, Tsuyoshi Ikehara
, Ryutaro Maeda

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

This paper reports a new proposal on PZT film formation technology both on planar and non-planar surface with use of spray coating method. SEM observation shows the film formation on non-planar and edged surface of Si-wafer. Ferroelectric properties is confirmed with ferroelectric test system. Several kinds of applications of this method is also shown for the future target. Keywords : PZT, spray coating method, non-planar surface, film formation.

Original language	English
Pages (from-to)	588-589
Number of pages	2
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	123
Issue number	12
DOIs	https://doi.org/10.1541/ieejsmas.123.588
State	Published - 2003
Externally published	Yes

Keywords

PZT
film formation
non-planar surface
spray coating method

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10.1541/ieejsmas.123.588

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title = "PZT Film Formation with Use of Spray Coating Method",

abstract = "This paper reports a new proposal on PZT film formation technology both on planar and non-planar surface with use of spray coating method. SEM observation shows the film formation on non-planar and edged surface of Si-wafer. Ferroelectric properties is confirmed with ferroelectric test system. Several kinds of applications of this method is also shown for the future target. Keywords : PZT, spray coating method, non-planar surface, film formation.",

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author = "Masaaki Ichiki and Lulu Zhang and Zhen Yang and Tsuyoshi Ikehara and Ryutaro Maeda",

year = "2003",

doi = "10.1541/ieejsmas.123.588",

language = "英语",

volume = "123",

pages = "588--589",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "Institute of Electrical Engineers of Japan",

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TY - JOUR

T1 - PZT Film Formation with Use of Spray Coating Method

AU - Ichiki, Masaaki

AU - Zhang, Lulu

AU - Yang, Zhen

AU - Ikehara, Tsuyoshi

AU - Maeda, Ryutaro

PY - 2003

Y1 - 2003

N2 - This paper reports a new proposal on PZT film formation technology both on planar and non-planar surface with use of spray coating method. SEM observation shows the film formation on non-planar and edged surface of Si-wafer. Ferroelectric properties is confirmed with ferroelectric test system. Several kinds of applications of this method is also shown for the future target. Keywords : PZT, spray coating method, non-planar surface, film formation.

AB - This paper reports a new proposal on PZT film formation technology both on planar and non-planar surface with use of spray coating method. SEM observation shows the film formation on non-planar and edged surface of Si-wafer. Ferroelectric properties is confirmed with ferroelectric test system. Several kinds of applications of this method is also shown for the future target. Keywords : PZT, spray coating method, non-planar surface, film formation.

KW - PZT

KW - film formation

KW - non-planar surface

KW - spray coating method

UR - https://www.scopus.com/pages/publications/85024439904

U2 - 10.1541/ieejsmas.123.588

DO - 10.1541/ieejsmas.123.588

M3 - 文章

AN - SCOPUS:85024439904

SN - 1341-8939

VL - 123

SP - 588

EP - 589

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

IS - 12

ER -

PZT Film Formation with Use of Spray Coating Method

Abstract

Keywords

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