Pulsed laser deposited lead zirconate titanate thin films for micro actuators

L. Zhang; M. Ichiki; Z. J. Wang; R. Maeda

doi:10.1109/IMNC.2002.1178626

Pulsed laser deposited lead zirconate titanate thin films for micro actuators

L. Zhang
, M. Ichiki
, Z. J. Wang
, R. Maeda

School of Instrument Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Lead zirconate Titanate (PbZr_0.52Ti_0.48O₃: PZT) thin films with excellent piezoelectricity have attracted great attention in microfabricated devices such as micro sensors and micro actuators. In order to prepare piezoelectric PZT thin films, many fabrication techniques such as sol-gel process, laser ablation and sputtering have been used. We have developed sol-gel process and fabricated the micro scanners actuated by sol-gel derived PZT thin films in our previous studies. However, there still are problems such as low deposition rate by sol-gel process. In this study, we prepared highly orientated PZT thin films for micro actuators by pulsed laser deposition (PLD) on the Si substrates with Pt bottom electrodes and one sol-gel derived PZT seed layer.

Original language	English
Title of host publication	2002 International Microprocesses and Nanotechnology Conference, MNC 2002
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	226-227
Number of pages	2
ISBN (Electronic)	4891140313, 9784891140311
DOIs	https://doi.org/10.1109/IMNC.2002.1178626
State	Published - 2002
Event	International Microprocesses and Nanotechnology Conference, MNC 2002 - Tokyo, Japan Duration: 6 Nov 2002 → 8 Nov 2002

Publication series

Name	2002 International Microprocesses and Nanotechnology Conference, MNC 2002

Conference

Conference	International Microprocesses and Nanotechnology Conference, MNC 2002
Country/Territory	Japan
City	Tokyo
Period	6/11/02 → 8/11/02

Access to Document

10.1109/IMNC.2002.1178626

Cite this

Zhang, L., Ichiki, M., Wang, Z. J., & Maeda, R. (2002). Pulsed laser deposited lead zirconate titanate thin films for micro actuators. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002 (pp. 226-227). Article 1178626 (2002 International Microprocesses and Nanotechnology Conference, MNC 2002). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.2002.1178626

@inproceedings{0a08befa93ab4e42924af373bc0a0fb1,

title = "Pulsed laser deposited lead zirconate titanate thin films for micro actuators",

abstract = "Lead zirconate Titanate (PbZr0.52Ti0.48O3: PZT) thin films with excellent piezoelectricity have attracted great attention in microfabricated devices such as micro sensors and micro actuators. In order to prepare piezoelectric PZT thin films, many fabrication techniques such as sol-gel process, laser ablation and sputtering have been used. We have developed sol-gel process and fabricated the micro scanners actuated by sol-gel derived PZT thin films in our previous studies. However, there still are problems such as low deposition rate by sol-gel process. In this study, we prepared highly orientated PZT thin films for micro actuators by pulsed laser deposition (PLD) on the Si substrates with Pt bottom electrodes and one sol-gel derived PZT seed layer.",

author = "L. Zhang and M. Ichiki and Wang, \{Z. J.\} and R. Maeda",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; International Microprocesses and Nanotechnology Conference, MNC 2002 ; Conference date: 06-11-2002 Through 08-11-2002",

year = "2002",

doi = "10.1109/IMNC.2002.1178626",

language = "英语",

series = "2002 International Microprocesses and Nanotechnology Conference, MNC 2002",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "226--227",

booktitle = "2002 International Microprocesses and Nanotechnology Conference, MNC 2002",

}

Zhang, L, Ichiki, M, Wang, ZJ & Maeda, R 2002, Pulsed laser deposited lead zirconate titanate thin films for micro actuators. in 2002 International Microprocesses and Nanotechnology Conference, MNC 2002., 1178626, 2002 International Microprocesses and Nanotechnology Conference, MNC 2002, Institute of Electrical and Electronics Engineers Inc., pp. 226-227, International Microprocesses and Nanotechnology Conference, MNC 2002, Tokyo, Japan, 6/11/02. https://doi.org/10.1109/IMNC.2002.1178626

Pulsed laser deposited lead zirconate titanate thin films for micro actuators. / Zhang, L.; Ichiki, M.; Wang, Z. J. et al.
2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc., 2002. p. 226-227 1178626 (2002 International Microprocesses and Nanotechnology Conference, MNC 2002).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Pulsed laser deposited lead zirconate titanate thin films for micro actuators

AU - Zhang, L.

AU - Ichiki, M.

AU - Wang, Z. J.

AU - Maeda, R.

PY - 2002

Y1 - 2002

N2 - Lead zirconate Titanate (PbZr0.52Ti0.48O3: PZT) thin films with excellent piezoelectricity have attracted great attention in microfabricated devices such as micro sensors and micro actuators. In order to prepare piezoelectric PZT thin films, many fabrication techniques such as sol-gel process, laser ablation and sputtering have been used. We have developed sol-gel process and fabricated the micro scanners actuated by sol-gel derived PZT thin films in our previous studies. However, there still are problems such as low deposition rate by sol-gel process. In this study, we prepared highly orientated PZT thin films for micro actuators by pulsed laser deposition (PLD) on the Si substrates with Pt bottom electrodes and one sol-gel derived PZT seed layer.

AB - Lead zirconate Titanate (PbZr0.52Ti0.48O3: PZT) thin films with excellent piezoelectricity have attracted great attention in microfabricated devices such as micro sensors and micro actuators. In order to prepare piezoelectric PZT thin films, many fabrication techniques such as sol-gel process, laser ablation and sputtering have been used. We have developed sol-gel process and fabricated the micro scanners actuated by sol-gel derived PZT thin films in our previous studies. However, there still are problems such as low deposition rate by sol-gel process. In this study, we prepared highly orientated PZT thin films for micro actuators by pulsed laser deposition (PLD) on the Si substrates with Pt bottom electrodes and one sol-gel derived PZT seed layer.

UR - https://www.scopus.com/pages/publications/84960430492

U2 - 10.1109/IMNC.2002.1178626

DO - 10.1109/IMNC.2002.1178626

M3 - 会议稿件

AN - SCOPUS:84960430492

T3 - 2002 International Microprocesses and Nanotechnology Conference, MNC 2002

SP - 226

EP - 227

BT - 2002 International Microprocesses and Nanotechnology Conference, MNC 2002

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - International Microprocesses and Nanotechnology Conference, MNC 2002

Y2 - 6 November 2002 through 8 November 2002

ER -

Zhang L, Ichiki M, Wang ZJ, Maeda R. Pulsed laser deposited lead zirconate titanate thin films for micro actuators. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc. 2002. p. 226-227. 1178626. (2002 International Microprocesses and Nanotechnology Conference, MNC 2002). doi: 10.1109/IMNC.2002.1178626

Pulsed laser deposited lead zirconate titanate thin films for micro actuators

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