Pulse poling within 1 second enhance the piezoelectric property of PZT thin films

T. Kobayashi; Y. Suzuki; N. Makimoto; H. Funakubo; R. Maeda

doi:10.1109/MEMSYS.2015.7051155

Pulse poling within 1 second enhance the piezoelectric property of PZT thin films

T. Kobayashi
, Y. Suzuki
, N. Makimoto
, H. Funakubo
, R. Maeda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

We have succeeded in enhancing the piezoelectric property of lead zirconate titanate (PZT) thin films by employing 'pulse poling' technique. We have fabricated MEMS-based microcantilevers using Pb(Zr_0.52,Ti_0.48)O₃ (MPB-PZT) thin films. By applying 1 kHz and 100 V of unipolar triangle pulse voltage, the transverse piezoelectric constant -d₃₁ of the PZT thin film has been enhanced as high as 105 pm/V, which is larger than the dc-poled PZT thin films (78 pm/V). The -d₃₁ of pulse-poled the PZT thin films measured under the unipolar actuation at 0-12 V reaches 158 pm/V. The results indicate that only 1 second of pulse poling gives better piezoelectric property of the PZT thin films compared to several minutes of dc poling.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1098-1101
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051155
State	Published - 26 Feb 2015
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Conference

Conference	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	18/01/15 → 22/01/15

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10.1109/MEMSYS.2015.7051155

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Kobayashi, T., Suzuki, Y., Makimoto, N., Funakubo, H., & Maeda, R. (2015). Pulse poling within 1 second enhance the piezoelectric property of PZT thin films. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 1098-1101). Article 7051155 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051155

Kobayashi, T. ; Suzuki, Y. ; Makimoto, N. et al. / Pulse poling within 1 second enhance the piezoelectric property of PZT thin films. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 1098-1101 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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title = "Pulse poling within 1 second enhance the piezoelectric property of PZT thin films",

abstract = "We have succeeded in enhancing the piezoelectric property of lead zirconate titanate (PZT) thin films by employing 'pulse poling' technique. We have fabricated MEMS-based microcantilevers using Pb(Zr0.52,Ti0.48)O3 (MPB-PZT) thin films. By applying 1 kHz and 100 V of unipolar triangle pulse voltage, the transverse piezoelectric constant -d31 of the PZT thin film has been enhanced as high as 105 pm/V, which is larger than the dc-poled PZT thin films (78 pm/V). The -d31 of pulse-poled the PZT thin films measured under the unipolar actuation at 0-12 V reaches 158 pm/V. The results indicate that only 1 second of pulse poling gives better piezoelectric property of the PZT thin films compared to several minutes of dc poling.",

author = "T. Kobayashi and Y. Suzuki and N. Makimoto and H. Funakubo and R. Maeda",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

year = "2015",

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doi = "10.1109/MEMSYS.2015.7051155",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Kobayashi, T, Suzuki, Y, Makimoto, N, Funakubo, H & Maeda, R 2015, Pulse poling within 1 second enhance the piezoelectric property of PZT thin films. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051155, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 1098-1101, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 18/01/15. https://doi.org/10.1109/MEMSYS.2015.7051155

Pulse poling within 1 second enhance the piezoelectric property of PZT thin films. / Kobayashi, T.; Suzuki, Y.; Makimoto, N. et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1098-1101 7051155 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Kobayashi, T.

AU - Suzuki, Y.

AU - Makimoto, N.

AU - Funakubo, H.

AU - Maeda, R.

PY - 2015/2/26

Y1 - 2015/2/26

N2 - We have succeeded in enhancing the piezoelectric property of lead zirconate titanate (PZT) thin films by employing 'pulse poling' technique. We have fabricated MEMS-based microcantilevers using Pb(Zr0.52,Ti0.48)O3 (MPB-PZT) thin films. By applying 1 kHz and 100 V of unipolar triangle pulse voltage, the transverse piezoelectric constant -d31 of the PZT thin film has been enhanced as high as 105 pm/V, which is larger than the dc-poled PZT thin films (78 pm/V). The -d31 of pulse-poled the PZT thin films measured under the unipolar actuation at 0-12 V reaches 158 pm/V. The results indicate that only 1 second of pulse poling gives better piezoelectric property of the PZT thin films compared to several minutes of dc poling.

AB - We have succeeded in enhancing the piezoelectric property of lead zirconate titanate (PZT) thin films by employing 'pulse poling' technique. We have fabricated MEMS-based microcantilevers using Pb(Zr0.52,Ti0.48)O3 (MPB-PZT) thin films. By applying 1 kHz and 100 V of unipolar triangle pulse voltage, the transverse piezoelectric constant -d31 of the PZT thin film has been enhanced as high as 105 pm/V, which is larger than the dc-poled PZT thin films (78 pm/V). The -d31 of pulse-poled the PZT thin films measured under the unipolar actuation at 0-12 V reaches 158 pm/V. The results indicate that only 1 second of pulse poling gives better piezoelectric property of the PZT thin films compared to several minutes of dc poling.

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Kobayashi T, Suzuki Y, Makimoto N, Funakubo H, Maeda R. Pulse poling within 1 second enhance the piezoelectric property of PZT thin films. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1098-1101. 7051155. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051155

Pulse poling within 1 second enhance the piezoelectric property of PZT thin films

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