Prospective of Magnetron Sputtering for Interface Design in Rechargeable Lithium Batteries

Rechargeable lithium batteries (LBs) are considered the most promising electrochemical energy storage systems for utilizing renewable energies like solar and wind, ushering society into an electric era. However, the development of LBs faces challenges due to interfacial issues caused by side reactions between existing electrode and electrolyte materials. Magnetron sputtering (MS), a type of physical vapor deposition technology, offers solutions with its wide material selection, gentle deposition process, high uniformity of nano/micro-scale thin films, and strong thin-film adhesion. This review outlines the main operating principles of MS technology and explores its advanced applications in interfacial modification of various cathodes, anodes, separators, solid-state electrolytes, and thin-film LBs integrated with other microelectronic devices. Furthermore, the review discusses the potential of MS technology to accelerate scientific research and industrial progress toward higher-performance LBs, advancing human society.