TY - JOUR
T1 - Properties of PbTiO3, La-modified PbTiO3 and Pb(Zr,Ti)O3 thin films and their application to infrared detectors
AU - Ren, Wei
AU - Liu, Yun
AU - Wu, Xiaoqing
AU - Zhang, Liangying
AU - Yao, X. I.
PY - 1997
Y1 - 1997
N2 - The structure and properties of PbTiO3, La-modified PbTiO3 and Pb(Zr,Ti)O3 ferroelectric thin films and multilayer pyroelectric thin films applied to infrared detectors were investigated. A PbTiO3 thin film with fine crystal grains has low dielectric constant and loss tangent, and its pyroelectric coefficient is 1. 6 × 10-8 C/cm2 K. A multilayer pyroelectric thin film is introduced to reduce thermal loss from the pyroelectric layer to the substrate. A porous SiO2 thin film with very low thermal conductivity was prepared and used as a thermal insulating layer. Experimental results show that the multilayer pyroelectric thin film can improve the pyroelectric response of a thin film detector remarkably at low frequency, and is a promising candidate for infrared detectors.
AB - The structure and properties of PbTiO3, La-modified PbTiO3 and Pb(Zr,Ti)O3 ferroelectric thin films and multilayer pyroelectric thin films applied to infrared detectors were investigated. A PbTiO3 thin film with fine crystal grains has low dielectric constant and loss tangent, and its pyroelectric coefficient is 1. 6 × 10-8 C/cm2 K. A multilayer pyroelectric thin film is introduced to reduce thermal loss from the pyroelectric layer to the substrate. A porous SiO2 thin film with very low thermal conductivity was prepared and used as a thermal insulating layer. Experimental results show that the multilayer pyroelectric thin film can improve the pyroelectric response of a thin film detector remarkably at low frequency, and is a promising candidate for infrared detectors.
UR - https://www.scopus.com/pages/publications/0000545306
U2 - 10.1080/10584589708015718
DO - 10.1080/10584589708015718
M3 - 文章
AN - SCOPUS:0000545306
SN - 1058-4587
VL - 15
SP - 271
EP - 279
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
IS - 1-4
ER -