Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing

Xiaoqing Wu; Wei Ren; Liangying Zhang; Xi Yao

doi:10.1080/00150199708260537

Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing

Xiaoqing Wu
, Wei Ren
, Liangying Zhang
, Xi Yao

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Properties of lead lanthanum titanate ferroelectric thin films by rapid thermaal annealing at various temperatures were investigated. The grain sizes of the films are about 20 nm from 500 - 850 °C. The remanent polarization Pr and the coercive field Ec of typical sampels are about 5.3 μ C/cm² and 102KV/cm, respectively. The dielectric constant is about 370, the dielectric loss tangent is less than 2% at 1KHz. Furthermore, grain sizes, morphologies, dielectric and ferroelectric properties of the thin films annealed by rapid thermal annealing (RTA) process, conventional furnace annealing (CFA) process and thermal annealing process of combination of RTA with CFA were compared.

Original language	English
Pages (from-to)	279-282
Number of pages	4
Journal	Ferroelectrics
Volume	195
Issue number	1-4
DOIs	https://doi.org/10.1080/00150199708260537
State	Published - 1997

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title = "Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing",

abstract = "Properties of lead lanthanum titanate ferroelectric thin films by rapid thermaal annealing at various temperatures were investigated. The grain sizes of the films are about 20 nm from 500 - 850 °C. The remanent polarization Pr and the coercive field Ec of typical sampels are about 5.3 μ C/cm2 and 102KV/cm, respectively. The dielectric constant is about 370, the dielectric loss tangent is less than 2\% at 1KHz. Furthermore, grain sizes, morphologies, dielectric and ferroelectric properties of the thin films annealed by rapid thermal annealing (RTA) process, conventional furnace annealing (CFA) process and thermal annealing process of combination of RTA with CFA were compared.",

author = "Xiaoqing Wu and Wei Ren and Liangying Zhang and Xi Yao",

year = "1997",

doi = "10.1080/00150199708260537",

language = "英语",

volume = "195",

pages = "279--282",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

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T1 - Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing

AU - Wu, Xiaoqing

AU - Ren, Wei

AU - Zhang, Liangying

AU - Yao, Xi

PY - 1997

Y1 - 1997

N2 - Properties of lead lanthanum titanate ferroelectric thin films by rapid thermaal annealing at various temperatures were investigated. The grain sizes of the films are about 20 nm from 500 - 850 °C. The remanent polarization Pr and the coercive field Ec of typical sampels are about 5.3 μ C/cm2 and 102KV/cm, respectively. The dielectric constant is about 370, the dielectric loss tangent is less than 2% at 1KHz. Furthermore, grain sizes, morphologies, dielectric and ferroelectric properties of the thin films annealed by rapid thermal annealing (RTA) process, conventional furnace annealing (CFA) process and thermal annealing process of combination of RTA with CFA were compared.

AB - Properties of lead lanthanum titanate ferroelectric thin films by rapid thermaal annealing at various temperatures were investigated. The grain sizes of the films are about 20 nm from 500 - 850 °C. The remanent polarization Pr and the coercive field Ec of typical sampels are about 5.3 μ C/cm2 and 102KV/cm, respectively. The dielectric constant is about 370, the dielectric loss tangent is less than 2% at 1KHz. Furthermore, grain sizes, morphologies, dielectric and ferroelectric properties of the thin films annealed by rapid thermal annealing (RTA) process, conventional furnace annealing (CFA) process and thermal annealing process of combination of RTA with CFA were compared.

UR - https://www.scopus.com/pages/publications/0031335106

U2 - 10.1080/00150199708260537

DO - 10.1080/00150199708260537

M3 - 文章

AN - SCOPUS:0031335106

SN - 0015-0193

VL - 195

SP - 279

EP - 282

JO - Ferroelectrics

JF - Ferroelectrics

IS - 1-4

ER -

Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing

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