TY - GEN
T1 - Properties and application of jet printed piezoelectric PZT film for actuation purposes
AU - Schroth, A.
AU - Ichiki, M.
AU - Akedo, J.
AU - Tanaka, M.
AU - Maeda, R.
N1 - Publisher Copyright:
© 1997 IEEE.
PY - 1997
Y1 - 1997
N2 - Although piezoelectric thin films are of great interest for actuator application in MEMS, deposition of PZT films with thickness between 5 and 100 μm has been hardly possible. It is therefore the goal of this paper, to investigate the properties of PZT-films of this thickness deposited by the recently introduced jet printing system, especially concerning an application in microactuator devices. On basic functional elements (beams, membranes) PZT-layers of 10 to 50 μm thickness were deposited, and their relative dielectric constant determined between 20 and 550. For the first time the piezoelectric constant of the jet printed PZT-layer was calculated to 20...30·10 -12 C/N from laser measurements of beam deflection, and therefore piezoelectric actuation capability could be proved directly.
AB - Although piezoelectric thin films are of great interest for actuator application in MEMS, deposition of PZT films with thickness between 5 and 100 μm has been hardly possible. It is therefore the goal of this paper, to investigate the properties of PZT-films of this thickness deposited by the recently introduced jet printing system, especially concerning an application in microactuator devices. On basic functional elements (beams, membranes) PZT-layers of 10 to 50 μm thickness were deposited, and their relative dielectric constant determined between 20 and 550. For the first time the piezoelectric constant of the jet printed PZT-layer was calculated to 20...30·10 -12 C/N from laser measurements of beam deflection, and therefore piezoelectric actuation capability could be proved directly.
UR - https://www.scopus.com/pages/publications/12444325282
U2 - 10.1109/MHS.1997.768859
DO - 10.1109/MHS.1997.768859
M3 - 会议稿件
AN - SCOPUS:12444325282
T3 - MHS 1997 - Proceedings of 1997 International Symposium on Micromechatronics and Human Science
SP - 67
EP - 72
BT - MHS 1997 - Proceedings of 1997 International Symposium on Micromechatronics and Human Science
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 8th International Symposium on Micromechatronics and Human Science, MHS 1997
Y2 - 5 October 1997 through 8 October 1997
ER -