Preparation of TiN films on AZ91C by cathode multi arc ion and its performance

Fan Duowang; Wang Chenglong; Ming Lingxiao; Zhao Lin; Liu Hongzhong

doi:10.1109/INOW.2007.4302883

Preparation of TiN films on AZ91C by cathode multi arc ion and its performance

Fan Duowang
, Wang Chenglong
, Ming Lingxiao
, Zhao Lin
, Liu Hongzhong

School of Mechanical Engineering

Lanzhou Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.

Original language	English
Title of host publication	2007 International Nano-Optelectronics Workshop, iNOW
Pages	70-71
Number of pages	2
DOIs	https://doi.org/10.1109/INOW.2007.4302883
State	Published - 2007
Event	International Nano-Optoelectronic Workshop, iNOW - Beijing and Lanzhou, China Duration: 29 Jul 2007 → 11 Aug 2007

Publication series

Name	2007 International Nano-Optelectronics Workshop, iNOW

Conference

Conference	International Nano-Optoelectronic Workshop, iNOW
Country/Territory	China
City	Beijing and Lanzhou
Period	29/07/07 → 11/08/07

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10.1109/INOW.2007.4302883

Cite this

@inproceedings{2adf3382bb2547b0a37651f49fdb3d1d,

title = "Preparation of TiN films on AZ91C by cathode multi arc ion and its performance",

abstract = "TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.",

author = "Fan Duowang and Wang Chenglong and Ming Lingxiao and Zhao Lin and Liu Hongzhong",

year = "2007",

doi = "10.1109/INOW.2007.4302883",

language = "英语",

isbn = "1424415918",

series = "2007 International Nano-Optelectronics Workshop, iNOW",

pages = "70--71",

booktitle = "2007 International Nano-Optelectronics Workshop, iNOW",

note = "International Nano-Optoelectronic Workshop, iNOW ; Conference date: 29-07-2007 Through 11-08-2007",

}

Duowang, F, Chenglong, W, Lingxiao, M, Lin, Z & Hongzhong, L 2007, Preparation of TiN films on AZ91C by cathode multi arc ion and its performance. in 2007 International Nano-Optelectronics Workshop, iNOW., 4302883, 2007 International Nano-Optelectronics Workshop, iNOW, pp. 70-71, International Nano-Optoelectronic Workshop, iNOW, Beijing and Lanzhou, China, 29/07/07. https://doi.org/10.1109/INOW.2007.4302883

Preparation of TiN films on AZ91C by cathode multi arc ion and its performance. / Duowang, Fan; Chenglong, Wang; Lingxiao, Ming et al.
2007 International Nano-Optelectronics Workshop, iNOW. 2007. p. 70-71 4302883 (2007 International Nano-Optelectronics Workshop, iNOW).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Preparation of TiN films on AZ91C by cathode multi arc ion and its performance

AU - Duowang, Fan

AU - Chenglong, Wang

AU - Lingxiao, Ming

AU - Lin, Zhao

AU - Hongzhong, Liu

PY - 2007

Y1 - 2007

N2 - TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.

AB - TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.

UR - https://www.scopus.com/pages/publications/47849110571

U2 - 10.1109/INOW.2007.4302883

DO - 10.1109/INOW.2007.4302883

M3 - 会议稿件

AN - SCOPUS:47849110571

SN - 1424415918

SN - 9781424415915

T3 - 2007 International Nano-Optelectronics Workshop, iNOW

SP - 70

EP - 71

BT - 2007 International Nano-Optelectronics Workshop, iNOW

T2 - International Nano-Optoelectronic Workshop, iNOW

Y2 - 29 July 2007 through 11 August 2007

ER -

Preparation of TiN films on AZ91C by cathode multi arc ion and its performance

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