Preparation and properties of conductive LaNiO3 thin films by a thermal decomposition of water-based solutions

  • Yun Ling
  • , Wei Ren
  • , Xiao Qing Wu
  • , Liang Ying Zhang
  • , Xi Yao

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

Conductive LaNiO3 (LNO) thin films were prepared by a thermal decomposition of water-based solutions. The structures, morphologies and resistivity of the LNO films are investigated as a function of thermal annealing rates and temperatures, and additives. Experimental results show that the LNO films annealed at a slow heating rate and without additive glycine have uniform and dense surface. The room-temperature resistivity of the films annealed at 650°C-700°C is about 0.81 mΩ cm. The rapid thermal annealing and addition of glycine in precursor solution lead to the deteriorated surface and larger resistivity. Published by Elsevier Science S.A.

Original languageEnglish
Pages (from-to)128-132
Number of pages5
JournalThin Solid Films
Volume311
Issue number1-2
DOIs
StatePublished - 31 Dec 1997

Keywords

  • Conductivity
  • Deposition process
  • Electrical properties and measurements
  • X-ray diffraction

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