Abstract
Conductive LaNiO3 (LNO) thin films were prepared by a thermal decomposition of water-based solutions. The structures, morphologies and resistivity of the LNO films are investigated as a function of thermal annealing rates and temperatures, and additives. Experimental results show that the LNO films annealed at a slow heating rate and without additive glycine have uniform and dense surface. The room-temperature resistivity of the films annealed at 650°C-700°C is about 0.81 mΩ cm. The rapid thermal annealing and addition of glycine in precursor solution lead to the deteriorated surface and larger resistivity. Published by Elsevier Science S.A.
| Original language | English |
|---|---|
| Pages (from-to) | 128-132 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 311 |
| Issue number | 1-2 |
| DOIs | |
| State | Published - 31 Dec 1997 |
Keywords
- Conductivity
- Deposition process
- Electrical properties and measurements
- X-ray diffraction