Piezoelectric properties of lead-free (Na_0.5Bi_0.5)_0.95Ba_0.05TiO₃ thin films on polycrystalline nickel foils

Lead-free (Na_0.5Bi_0.5)_0.95Ba_0.05TiO₃ (0.95NBT-0.05BT) thin films were deposited on polycrystalline Ni substrates by using the RF high-pressure sputtering system. Microstructural studies by high resolution X-ray diffraction reveal that the as-deposited 0.95NBT-0.05BT thin films are polycrystalline structures. The piezoelectric property measurements by a piezoresponse force microscopy exhibit that the polycrystalline 0.95NBT-0.05BT thin films have an excellent piezoelectric response. It is indicated that the as-grown 0.95NBT-0.05BT thin films have the potential for the development of the structural health monitoring systems and related device applications.