@inproceedings{2afc673c73ce465dac1281c4601912d0,
title = "Physical damage effect of microelectrodes under nanosecond pulse induced breakdown",
abstract = "Electrical breakdown due to overvoltage may result in a series of performance degradation and physical damage to microelectronic devices. In this paper, we present the physical damage effect of nanogaps in microelectronic devices and explore the relationship between the morphology change and injected energy during breakdown process. The nanoscale discharge characteristics experimental system based on a focused ion beam, a nanometer manipulator and a DC power supply generator was established, which could be used to simulate the typical nanosecond pulse impact event while electrostatic charge accumulates between the nanogaps. Different types of voltage stresses were applied to tungsten microelectrodes so as to understand the relationship between physical morphology change and injected energy. The morphology change process was obtained and the mechanism for the multi-physical coupling induced physical damage was then put forward.",
keywords = "injected energy, morphology change, nanogaps, nanosecond pulse, physical damage",
author = "Guodong Meng and Yonghong Cheng and Chengye Dong and Lei Chen and Chuang Men",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th IEEE International Conference on the Properties and Applications of Dielectric Materials, ICPADM 2015 ; Conference date: 19-07-2015 Through 22-07-2015",
year = "2015",
month = oct,
day = "8",
doi = "10.1109/ICPADM.2015.7295425",
language = "英语",
series = "Proceedings of the IEEE International Conference on Properties and Applications of Dielectric Materials",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "927--930",
booktitle = "ICPADM 2015 - 2015 IEEE 11th International Conference on the Properties and Applications of Dielectric Materials",
}