Phase transformation type micro pump

H. Takagi; R. Maeda; K. Ozaki; M. Parameswaran; M. Mehta

doi:10.1109/ismmhs.1994.512924

Phase transformation type micro pump

H. Takagi
, R. Maeda
, K. Ozaki
, M. Parameswaran
, M. Mehta

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to conference › Paper › peer-review

26 Scopus citations

Abstract

A new type micro pump which uses liquid-vapor phase transformation is developed. Along with liquid to vapor phase transformation, coefficient of kinematic viscosity increases. This means that viscous resistance for mass flow through a channel can be changed by phase transformation. Volume expansion and viscous resistance change by the controlled evaporation produce one directional mass flow. This pump consists of a micro channel and an array of heating elements. This structure is favorable for a micro pump because no mechanical moving parts such as valves are needed. A prototype pump was fabricated by the silicon micro machining technique. By scanning electric current that is supplied through the heaters with different phases cyclically, water in the channel was evaporated and pumped toward the scanning direction.

Original language	English
Pages	199-202
Number of pages	4
DOIs	https://doi.org/10.1109/ismmhs.1994.512924
State	Published - 1994
Externally published	Yes
Event	Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings - Nagoya, Jpn Duration: 2 Oct 1994 → 4 Oct 1994

Conference

Conference	Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings
City	Nagoya, Jpn
Period	2/10/94 → 4/10/94

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10.1109/ismmhs.1994.512924

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title = "Phase transformation type micro pump",

abstract = "A new type micro pump which uses liquid-vapor phase transformation is developed. Along with liquid to vapor phase transformation, coefficient of kinematic viscosity increases. This means that viscous resistance for mass flow through a channel can be changed by phase transformation. Volume expansion and viscous resistance change by the controlled evaporation produce one directional mass flow. This pump consists of a micro channel and an array of heating elements. This structure is favorable for a micro pump because no mechanical moving parts such as valves are needed. A prototype pump was fabricated by the silicon micro machining technique. By scanning electric current that is supplied through the heaters with different phases cyclically, water in the channel was evaporated and pumped toward the scanning direction.",

author = "H. Takagi and R. Maeda and K. Ozaki and M. Parameswaran and M. Mehta",

year = "1994",

doi = "10.1109/ismmhs.1994.512924",

language = "英语",

pages = "199--202",

note = "Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings ; Conference date: 02-10-1994 Through 04-10-1994",

}

TY - CONF

T1 - Phase transformation type micro pump

AU - Takagi, H.

AU - Maeda, R.

AU - Ozaki, K.

AU - Parameswaran, M.

AU - Mehta, M.

PY - 1994

Y1 - 1994

N2 - A new type micro pump which uses liquid-vapor phase transformation is developed. Along with liquid to vapor phase transformation, coefficient of kinematic viscosity increases. This means that viscous resistance for mass flow through a channel can be changed by phase transformation. Volume expansion and viscous resistance change by the controlled evaporation produce one directional mass flow. This pump consists of a micro channel and an array of heating elements. This structure is favorable for a micro pump because no mechanical moving parts such as valves are needed. A prototype pump was fabricated by the silicon micro machining technique. By scanning electric current that is supplied through the heaters with different phases cyclically, water in the channel was evaporated and pumped toward the scanning direction.

AB - A new type micro pump which uses liquid-vapor phase transformation is developed. Along with liquid to vapor phase transformation, coefficient of kinematic viscosity increases. This means that viscous resistance for mass flow through a channel can be changed by phase transformation. Volume expansion and viscous resistance change by the controlled evaporation produce one directional mass flow. This pump consists of a micro channel and an array of heating elements. This structure is favorable for a micro pump because no mechanical moving parts such as valves are needed. A prototype pump was fabricated by the silicon micro machining technique. By scanning electric current that is supplied through the heaters with different phases cyclically, water in the channel was evaporated and pumped toward the scanning direction.

UR - https://www.scopus.com/pages/publications/0028749327

U2 - 10.1109/ismmhs.1994.512924

DO - 10.1109/ismmhs.1994.512924

M3 - 论文

AN - SCOPUS:0028749327

SP - 199

EP - 202

T2 - Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings

Y2 - 2 October 1994 through 4 October 1994

ER -

Phase transformation type micro pump

Abstract

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