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Phase extraction from random phase-shifted shadow moiré fringe patterns using stereovision technique

  • Feifei Gu
  • , Hubing Du
  • , Hong Zhao
  • , Bing Li
  • Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The measurement accuracy of phase shifting shadow moiré is limited by the spatially non-uniform and random phase shift error. Substantial work has been developed to overcome this difficulty. But few works are proposed to deal with the two error sources above simultaneously. In the presented paper, we describe a solution that can compensate the both error sources at the same time. In our proposed method, a binocular stereovision system is integrated into our test configuration. By measuring the coordinates of marks attached to the measurement grating, the stereovision system obtains the position and the setting parameters are calibrated. Then, the acquiring three fringe patterns are analyzed by iterative least squares method in temporal and the phase shift is calibrated by the least squares fitting in spatial. Because a local cost function is used, the proposed calibration technique is insensitive to spatial variations in detector response. Numerical simulations and optical experiments show that the proposed method can effectively minimize the two phase shift error sources and possess a superior performance than the existing typical phase shifting algorithm.

Original languageEnglish
Title of host publicationMetrology, Inspection, and Process Control for Microlithography XXVII
DOIs
StatePublished - 2013
Event27th Conference on Metrology, Inspection, and Process Control for Microlithography - San Jose, CA, United States
Duration: 25 Feb 201328 Feb 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8681
ISSN (Print)0277-786X

Conference

Conference27th Conference on Metrology, Inspection, and Process Control for Microlithography
Country/TerritoryUnited States
CitySan Jose, CA
Period25/02/1328/02/13

Keywords

  • Iterative algorithm
  • Phase
  • Phase-shifting
  • Shadow moiré
  • Stereovision

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