TY - GEN
T1 - Parasitic resistance elimination for the flexibly thin film grid pressure sensor
AU - Zhou, Gaofeng
AU - Zhao, Yulong
AU - Jiang, Zhuangde
PY - 2008
Y1 - 2008
N2 - The original structure of the flexibly thin film grid pressure sensor often suffers from the parasitic resistance of itself structure. In order to eliminate the parasitic resistance, the new "interlayer" structure of this sensor with good performance indexes was brought forward and given out after defects of original structure were analyzed and pointed out. The detecting principle and fabricating procedures of new structure were narrated minutely in this paper. The corresponding experiment was done, based on the test device. The experimenting results showed that the new "interlayer" structure with good performance indexes could measure out interface pressure distribution between touching objects and further eliminate the parasitic resistance.
AB - The original structure of the flexibly thin film grid pressure sensor often suffers from the parasitic resistance of itself structure. In order to eliminate the parasitic resistance, the new "interlayer" structure of this sensor with good performance indexes was brought forward and given out after defects of original structure were analyzed and pointed out. The detecting principle and fabricating procedures of new structure were narrated minutely in this paper. The corresponding experiment was done, based on the test device. The experimenting results showed that the new "interlayer" structure with good performance indexes could measure out interface pressure distribution between touching objects and further eliminate the parasitic resistance.
KW - Piezoresistive principle
KW - Silver electrodes
KW - The "interlayer" structure
KW - The flexibly thin film grid pressure sensor
UR - https://www.scopus.com/pages/publications/63049122504
U2 - 10.1109/ICSENST.2008.4757168
DO - 10.1109/ICSENST.2008.4757168
M3 - 会议稿件
AN - SCOPUS:63049122504
SN - 9781424421770
T3 - Proceedings of the 3rd International Conference on Sensing Technology, ICST 2008
SP - 557
EP - 562
BT - Proceedings of the 3rd International Conference on Sensing Technology, ICST 2008
T2 - 3rd International Conference on Sensing Technology, ICST 2008
Y2 - 30 November 2008 through 3 December 2008
ER -