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Parasitic resistance elimination for the flexibly thin film grid pressure sensor

  • Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The original structure of the flexibly thin film grid pressure sensor often suffers from the parasitic resistance of itself structure. In order to eliminate the parasitic resistance, the new "interlayer" structure of this sensor with good performance indexes was brought forward and given out after defects of original structure were analyzed and pointed out. The detecting principle and fabricating procedures of new structure were narrated minutely in this paper. The corresponding experiment was done, based on the test device. The experimenting results showed that the new "interlayer" structure with good performance indexes could measure out interface pressure distribution between touching objects and further eliminate the parasitic resistance.

Original languageEnglish
Title of host publicationProceedings of the 3rd International Conference on Sensing Technology, ICST 2008
Pages557-562
Number of pages6
DOIs
StatePublished - 2008
Event3rd International Conference on Sensing Technology, ICST 2008 - Tainan, Taiwan, Province of China
Duration: 30 Nov 20083 Dec 2008

Publication series

NameProceedings of the 3rd International Conference on Sensing Technology, ICST 2008

Conference

Conference3rd International Conference on Sensing Technology, ICST 2008
Country/TerritoryTaiwan, Province of China
CityTainan
Period30/11/083/12/08

Keywords

  • Piezoresistive principle
  • Silver electrodes
  • The "interlayer" structure
  • The flexibly thin film grid pressure sensor

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