P-Type macroporous silicon having three-dimensional structure

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Abstract

Macroporous silicon with three-dimensional structure was fabricated using organic-based electrolyte, dimethylformamide (DMF), in the p-type silicon. The obtained three-dimensional macroporous structures grew wholly along the <100> orientation of the p-type silicon wafer.

Original languageEnglish
Pages (from-to)1432-1433
Number of pages2
JournalChemical Communications
Volume4
Issue number12
DOIs
StatePublished - 2004
Externally publishedYes

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