Optimized optomechanical micro-cantilever array for uncooled infrared imaging

Feng Liang Dong; Qing Chuan Zhang; Da Peng Chen; Zheng Yu Miao; Zhi Ming Xiong; Zhe Ying Guo; Chao Bo Li; Bin Bin Jiao; Xiao Ping Wu

doi:10.1088/0256-307X/24/12/020

Optimized optomechanical micro-cantilever array for uncooled infrared imaging

Feng Liang Dong
, Qing Chuan Zhang
, Da Peng Chen
, Zheng Yu Miao
, Zhi Ming Xiong
, Zhe Ying Guo
, Chao Bo Li
, Bin Bin Jiao
, Xiao Ping Wu

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

We present a new substrate-free bimaterial cantilever array made of SiN_x and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160 × 160 array with a 120 μm × 120 μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270 mK.

Original language	English
Pages (from-to)	3362-3364
Number of pages	3
Journal	Chinese Physics Letters
Volume	24
Issue number	12
DOIs	https://doi.org/10.1088/0256-307X/24/12/020
State	Published - 1 Dec 2007
Externally published	Yes

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10.1088/0256-307X/24/12/020

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title = "Optimized optomechanical micro-cantilever array for uncooled infrared imaging",

abstract = "We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160 × 160 array with a 120 μm × 120 μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270 mK.",

author = "Dong, \{Feng Liang\} and Zhang, \{Qing Chuan\} and Chen, \{Da Peng\} and Miao, \{Zheng Yu\} and Xiong, \{Zhi Ming\} and Guo, \{Zhe Ying\} and Li, \{Chao Bo\} and Jiao, \{Bin Bin\} and Wu, \{Xiao Ping\}",

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doi = "10.1088/0256-307X/24/12/020",

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TY - JOUR

T1 - Optimized optomechanical micro-cantilever array for uncooled infrared imaging

AU - Dong, Feng Liang

AU - Zhang, Qing Chuan

AU - Chen, Da Peng

AU - Miao, Zheng Yu

AU - Xiong, Zhi Ming

AU - Guo, Zhe Ying

AU - Li, Chao Bo

AU - Jiao, Bin Bin

AU - Wu, Xiao Ping

PY - 2007/12/1

Y1 - 2007/12/1

N2 - We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160 × 160 array with a 120 μm × 120 μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270 mK.

AB - We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160 × 160 array with a 120 μm × 120 μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270 mK.

UR - https://www.scopus.com/pages/publications/37249011210

U2 - 10.1088/0256-307X/24/12/020

DO - 10.1088/0256-307X/24/12/020

M3 - 文章

AN - SCOPUS:37249011210

SN - 0256-307X

VL - 24

SP - 3362

EP - 3364

JO - Chinese Physics Letters

JF - Chinese Physics Letters

IS - 12

ER -

Optimized optomechanical micro-cantilever array for uncooled infrared imaging

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