Optimization of structure of large format TES arrays

H. Yoshitake; Y. Ezoe; T. Yoshino; K. Mukai; K. Ishikawa; K. Mitsuda; N. Y. Yamasaki; Y. Ishisaki; H. Akamatsu; R. Maeda; T. Takano

doi:10.1109/TASC.2009.2019227

Optimization of structure of large format TES arrays

H. Yoshitake
, Y. Ezoe
, T. Yoshino
, K. Mukai
, K. Ishikawa
, K. Mitsuda
, N. Y. Yamasaki
, Y. Ishisaki
, H. Akamatsu
, R. Maeda
, T. Takano

JAXA Institute of Space and Astronautical Science
Tokyo Metropolitan University
National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We fabricated 16 × 16 format arrays of 180 μm square Ti/Au superconducting transition edge X-ray mi- crocalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO₂ and SiN_x membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.

Original language	English
Article number	5075610
Pages (from-to)	456-459
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	19
Issue number	3
DOIs	https://doi.org/10.1109/TASC.2009.2019227
State	Published - Jun 2009
Externally published	Yes

Keywords

Transition edge sensor
X-ray microcalorimeter

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10.1109/TASC.2009.2019227

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title = "Optimization of structure of large format TES arrays",

abstract = "We fabricated 16 × 16 format arrays of 180 μm square Ti/Au superconducting transition edge X-ray mi- crocalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.",

keywords = "Transition edge sensor, X-ray microcalorimeter",

author = "H. Yoshitake and Y. Ezoe and T. Yoshino and K. Mukai and K. Ishikawa and K. Mitsuda and Yamasaki, \{N. Y.\} and Y. Ishisaki and H. Akamatsu and R. Maeda and T. Takano",

year = "2009",

month = jun,

doi = "10.1109/TASC.2009.2019227",

language = "英语",

volume = "19",

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journal = "IEEE Transactions on Applied Superconductivity",

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T1 - Optimization of structure of large format TES arrays

AU - Yoshitake, H.

AU - Ezoe, Y.

AU - Yoshino, T.

AU - Mukai, K.

AU - Ishikawa, K.

AU - Mitsuda, K.

AU - Yamasaki, N. Y.

AU - Ishisaki, Y.

AU - Akamatsu, H.

AU - Maeda, R.

AU - Takano, T.

PY - 2009/6

Y1 - 2009/6

N2 - We fabricated 16 × 16 format arrays of 180 μm square Ti/Au superconducting transition edge X-ray mi- crocalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.

AB - We fabricated 16 × 16 format arrays of 180 μm square Ti/Au superconducting transition edge X-ray mi- crocalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au absorber was 11 eV (FWHM) at 5.9 keV, while the baseline resolution is about 3.7 eV.

KW - Transition edge sensor

KW - X-ray microcalorimeter

UR - https://www.scopus.com/pages/publications/68649105427

U2 - 10.1109/TASC.2009.2019227

DO - 10.1109/TASC.2009.2019227

M3 - 文章

AN - SCOPUS:68649105427

SN - 1051-8223

VL - 19

SP - 456

EP - 459

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 3

M1 - 5075610

ER -

Optimization of structure of large format TES arrays

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Keywords

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