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Optical subsurface damage evaluation using LSCT

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

The evaluation of subsurface damage (SSD) has become a key problem in optical engineering field. Laser scanning confocal technology (LSCT) is one of the potential SSD non-destructive evaluation (NDE) methods. Under three assumptions, an innovative and credible scattering model, which is to detect subsurface defect through LSCT, is built base on the classical Mie light scattering theory. Aimed to the model, three important parameters are discussed respectively that is N.A., wave length and relatively refraction index. In order to verify the reasonableness of the model, an effective measurement is done for a usual polished optical surface, and the survey result is in accord with the model. At last, several helpful conclusions about subsurface damage assessment using LSCT are given.

Original languageEnglish
Title of host publicationFourth International Conference on Experimental Mechanics
DOIs
StatePublished - 2010
Event4th International Conference on Experimental Mechanics - Singapore, Singapore
Duration: 18 Nov 200920 Nov 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7522
ISSN (Print)0277-786X

Conference

Conference4th International Conference on Experimental Mechanics
Country/TerritorySingapore
CitySingapore
Period18/11/0920/11/09

Keywords

  • Laser scanning confocal technology
  • Scattering model
  • Subsurface damage

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