On the preparation and microstructure of Y-doped BaCeO3 perovskite thin films

T. He; C. L. Jia; P. Ehrhart; P. Meuffels

doi:10.1016/0167-2738(96)00033-1

On the preparation and microstructure of Y-doped BaCeO₃ perovskite thin films

T. He
, C. L. Jia
, P. Ehrhart
, P. Meuffels

Jülich Research Centre
Max Planck Institute for Solid State Research

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Thin films of the Y-doped stoichiometric high temperature protonic conductor barium cerate, BaCeO₃, were deposited on single-crystalline MgO (001) substrates by RF-magnetron sputtering techniques. The films were characterized by X-ray diffraction, Rutherford backscattering spectroscopy and transmission electron microscopy. It was found that the microstructure and the phase purity of the films depend strongly on the substrate temperature. The films deposited at the optimum substrate temperature of 550°C are polycrystalline but strongly textured with the {110} planes of the pseudo-cubic perovskite unit cell parallel or close to the substrate surface.

Original language	English
Pages (from-to)	9-12
Number of pages	4
Journal	Solid State Ionics
Volume	89
Issue number	1-2
DOIs	https://doi.org/10.1016/0167-2738(96)00033-1
State	Published - 1 Aug 1996
Externally published	Yes

Keywords

BaCeO
Film deposition
RF-magnetron sputtering
TEM
Texture

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10.1016/0167-2738(96)00033-1

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title = "On the preparation and microstructure of Y-doped BaCeO3 perovskite thin films",

abstract = "Thin films of the Y-doped stoichiometric high temperature protonic conductor barium cerate, BaCeO3, were deposited on single-crystalline MgO (001) substrates by RF-magnetron sputtering techniques. The films were characterized by X-ray diffraction, Rutherford backscattering spectroscopy and transmission electron microscopy. It was found that the microstructure and the phase purity of the films depend strongly on the substrate temperature. The films deposited at the optimum substrate temperature of 550°C are polycrystalline but strongly textured with the \{110\} planes of the pseudo-cubic perovskite unit cell parallel or close to the substrate surface.",

keywords = "BaCeO, Film deposition, RF-magnetron sputtering, TEM, Texture",

author = "T. He and Jia, \{C. L.\} and P. Ehrhart and P. Meuffels",

year = "1996",

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doi = "10.1016/0167-2738(96)00033-1",

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TY - JOUR

T1 - On the preparation and microstructure of Y-doped BaCeO3 perovskite thin films

AU - He, T.

AU - Jia, C. L.

AU - Ehrhart, P.

AU - Meuffels, P.

PY - 1996/8/1

Y1 - 1996/8/1

N2 - Thin films of the Y-doped stoichiometric high temperature protonic conductor barium cerate, BaCeO3, were deposited on single-crystalline MgO (001) substrates by RF-magnetron sputtering techniques. The films were characterized by X-ray diffraction, Rutherford backscattering spectroscopy and transmission electron microscopy. It was found that the microstructure and the phase purity of the films depend strongly on the substrate temperature. The films deposited at the optimum substrate temperature of 550°C are polycrystalline but strongly textured with the {110} planes of the pseudo-cubic perovskite unit cell parallel or close to the substrate surface.

AB - Thin films of the Y-doped stoichiometric high temperature protonic conductor barium cerate, BaCeO3, were deposited on single-crystalline MgO (001) substrates by RF-magnetron sputtering techniques. The films were characterized by X-ray diffraction, Rutherford backscattering spectroscopy and transmission electron microscopy. It was found that the microstructure and the phase purity of the films depend strongly on the substrate temperature. The films deposited at the optimum substrate temperature of 550°C are polycrystalline but strongly textured with the {110} planes of the pseudo-cubic perovskite unit cell parallel or close to the substrate surface.

KW - BaCeO

KW - Film deposition

KW - RF-magnetron sputtering

KW - TEM

KW - Texture

UR - https://www.scopus.com/pages/publications/0030206766

U2 - 10.1016/0167-2738(96)00033-1

DO - 10.1016/0167-2738(96)00033-1

M3 - 文章

AN - SCOPUS:0030206766

SN - 0167-2738

VL - 89

SP - 9

EP - 12

JO - Solid State Ionics

JF - Solid State Ionics

IS - 1-2

ER -

On the preparation and microstructure of Y-doped BaCeO₃ perovskite thin films

Abstract

Keywords

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