TY - JOUR
T1 - On the electron sheath theory and its applications in plasma-surface interactions
AU - Sun, Guangyu
AU - Zhang, Shu
AU - Sun, Anbang
AU - Zhang, Guanjun
N1 - Publisher Copyright:
© 2022 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing.
PY - 2022/9/1
Y1 - 2022/9/1
N2 - In this work, an improved understanding of electron sheath theory is provided using both fluid and kinetic approaches while elaborating on their implications for plasma-surface interactions. A fluid model is proposed considering the electron presheath structure, avoiding the singularity in electron sheath Child-Langmuir law which overestimates the sheath potential. Subsequently, a kinetic model of electron sheath is established, showing considerably different sheath profiles in respect to the fluid model due to non-Maxwellian electron velocity distribution function and finite ion temperature. The kinetic model is then further generalized and involves a more realistic truncated ion velocity distribution function. It is demonstrated that such a distribution function yields a super-thermal electron sheath whose entering velocity at the sheath edge is greater than the Bohm criterion prediction. Furthermore, an attempt is made to describe the electron presheath-sheath coupling within the kinetic framework, showing a necessary compromise between a realistic sheath entrance and the inclusion of kinetic effects. Finally, the secondary electron emissions induced by sheath-accelerated plasma electrons in an electron sheath are analysed and the influence of backscattering is discussed.
AB - In this work, an improved understanding of electron sheath theory is provided using both fluid and kinetic approaches while elaborating on their implications for plasma-surface interactions. A fluid model is proposed considering the electron presheath structure, avoiding the singularity in electron sheath Child-Langmuir law which overestimates the sheath potential. Subsequently, a kinetic model of electron sheath is established, showing considerably different sheath profiles in respect to the fluid model due to non-Maxwellian electron velocity distribution function and finite ion temperature. The kinetic model is then further generalized and involves a more realistic truncated ion velocity distribution function. It is demonstrated that such a distribution function yields a super-thermal electron sheath whose entering velocity at the sheath edge is greater than the Bohm criterion prediction. Furthermore, an attempt is made to describe the electron presheath-sheath coupling within the kinetic framework, showing a necessary compromise between a realistic sheath entrance and the inclusion of kinetic effects. Finally, the secondary electron emissions induced by sheath-accelerated plasma electrons in an electron sheath are analysed and the influence of backscattering is discussed.
KW - Child-Langmuir law
KW - plasma sheath
KW - plasma-surface interaction
KW - secondary electron emission
UR - https://www.scopus.com/pages/publications/85134767637
U2 - 10.1088/2058-6272/ac6aa7
DO - 10.1088/2058-6272/ac6aa7
M3 - 文章
AN - SCOPUS:85134767637
SN - 1009-0630
VL - 24
JO - Plasma Science and Technology
JF - Plasma Science and Technology
IS - 9
M1 - 095401
ER -