Ohmic contact of Pt/Au on hydrogen-terminated single crystal diamond

Minghui Zhang; Fang Lin; Wei Wang; Fengnan Li; Yan Feng Wang; Haris Naeem Abbasi; Dan Zhao; Genqiang Chen; Feng Wen; Jingwen Zhang; Renan Bu; Hongxing Wang

doi:10.3390/coatings9090539

Ohmic contact of Pt/Au on hydrogen-terminated single crystal diamond

Minghui Zhang
, Fang Lin
, Wei Wang
, Fengnan Li
, Yan Feng Wang
, Haris Naeem Abbasi
, Dan Zhao
, Genqiang Chen
, Feng Wen
, Jingwen Zhang
, Renan Bu
, Hongxing Wang

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

In this study, contact properties of platinum/gold (Pt/Au) on the surface of hydrogen-terminated single crystal diamond (H-SCD) were studied with several treatment conditions. The electrodes of Pt (20 nm)/Au (100 nm) were deposited on H-SCD surface by electron beam evaporation technique. Then, the specific contact resistance (ρ_c) of the as-fabricated sample was measured by the circular transmission line model, which showed good ohmic properties with the value of 5.65 × 10-4 Ω·cm². To identify the thermal stability of Pt/Au/H-SCD, the sample was annealed in hydrogen ambient from 200 to 700 °C for 20 min at each temperature. As the temperature increased, ρc demonstrated better thermal stability. In addition, the barrier height was evaluated to be -0.67 ± 0.12 eV by X-ray photoelectron spectroscopy (XPS) technique.

Original language	English
Article number	539
Journal	Coatings
Volume	9
Issue number	9
DOIs	https://doi.org/10.3390/coatings9090539
State	Published - 1 Sep 2019

Keywords

Annealing
Diamond
Ohmic contact
Platinum
XPS

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10.3390/coatings9090539

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@article{300bdf48bf1f45c28f247c0440bf0cd1,

title = "Ohmic contact of Pt/Au on hydrogen-terminated single crystal diamond",

abstract = "In this study, contact properties of platinum/gold (Pt/Au) on the surface of hydrogen-terminated single crystal diamond (H-SCD) were studied with several treatment conditions. The electrodes of Pt (20 nm)/Au (100 nm) were deposited on H-SCD surface by electron beam evaporation technique. Then, the specific contact resistance (ρc) of the as-fabricated sample was measured by the circular transmission line model, which showed good ohmic properties with the value of 5.65 × 10-4 Ω·cm2. To identify the thermal stability of Pt/Au/H-SCD, the sample was annealed in hydrogen ambient from 200 to 700 °C for 20 min at each temperature. As the temperature increased, ρc demonstrated better thermal stability. In addition, the barrier height was evaluated to be -0.67 ± 0.12 eV by X-ray photoelectron spectroscopy (XPS) technique.",

keywords = "Annealing, Diamond, Ohmic contact, Platinum, XPS",

author = "Minghui Zhang and Fang Lin and Wei Wang and Fengnan Li and Wang, \{Yan Feng\} and Abbasi, \{Haris Naeem\} and Dan Zhao and Genqiang Chen and Feng Wen and Jingwen Zhang and Renan Bu and Hongxing Wang",

note = "Publisher Copyright: {\textcopyright} 2019 by the authors.",

year = "2019",

month = sep,

day = "1",

doi = "10.3390/coatings9090539",

language = "英语",

volume = "9",

journal = "Coatings",

issn = "2079-6412",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "9",

}

TY - JOUR

T1 - Ohmic contact of Pt/Au on hydrogen-terminated single crystal diamond

AU - Zhang, Minghui

AU - Lin, Fang

AU - Wang, Wei

AU - Li, Fengnan

AU - Wang, Yan Feng

AU - Abbasi, Haris Naeem

AU - Zhao, Dan

AU - Chen, Genqiang

AU - Wen, Feng

AU - Zhang, Jingwen

AU - Bu, Renan

AU - Wang, Hongxing

PY - 2019/9/1

Y1 - 2019/9/1

N2 - In this study, contact properties of platinum/gold (Pt/Au) on the surface of hydrogen-terminated single crystal diamond (H-SCD) were studied with several treatment conditions. The electrodes of Pt (20 nm)/Au (100 nm) were deposited on H-SCD surface by electron beam evaporation technique. Then, the specific contact resistance (ρc) of the as-fabricated sample was measured by the circular transmission line model, which showed good ohmic properties with the value of 5.65 × 10-4 Ω·cm2. To identify the thermal stability of Pt/Au/H-SCD, the sample was annealed in hydrogen ambient from 200 to 700 °C for 20 min at each temperature. As the temperature increased, ρc demonstrated better thermal stability. In addition, the barrier height was evaluated to be -0.67 ± 0.12 eV by X-ray photoelectron spectroscopy (XPS) technique.

AB - In this study, contact properties of platinum/gold (Pt/Au) on the surface of hydrogen-terminated single crystal diamond (H-SCD) were studied with several treatment conditions. The electrodes of Pt (20 nm)/Au (100 nm) were deposited on H-SCD surface by electron beam evaporation technique. Then, the specific contact resistance (ρc) of the as-fabricated sample was measured by the circular transmission line model, which showed good ohmic properties with the value of 5.65 × 10-4 Ω·cm2. To identify the thermal stability of Pt/Au/H-SCD, the sample was annealed in hydrogen ambient from 200 to 700 °C for 20 min at each temperature. As the temperature increased, ρc demonstrated better thermal stability. In addition, the barrier height was evaluated to be -0.67 ± 0.12 eV by X-ray photoelectron spectroscopy (XPS) technique.

KW - Annealing

KW - Diamond

KW - Ohmic contact

KW - Platinum

KW - XPS

UR - https://www.scopus.com/pages/publications/85072194579

U2 - 10.3390/coatings9090539

DO - 10.3390/coatings9090539

M3 - 文章

AN - SCOPUS:85072194579

SN - 2079-6412

VL - 9

JO - Coatings

JF - Coatings

IS - 9

M1 - 539

ER -

Ohmic contact of Pt/Au on hydrogen-terminated single crystal diamond

Abstract

Keywords

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