TY - GEN
T1 - Numerical simulation of time and temperature dependent polymer deformation in thermal imprint process
AU - Takagi, H.
AU - Takahashi, M.
AU - Hiroshima, H.
AU - Maeda, R.
PY - 2008
Y1 - 2008
N2 - A finite element simulation tool for thermal imprint process has been developed. In the system, polymer is assumed to be a visco-elastic body represented by the generalized Maxwell model. We experimentally measured visco-elastic properties of a polymer material and derived parameters used in the simulation tool. Using the same polymer material, we performed imprint experiments to examine time and temperature dependent polymer deformation. Comparing the polymer deformations in simulated results with those in experiments, we confirmed that the developed simulation tool and the measured material parameters were useful for analysis of thermal imprint process.
AB - A finite element simulation tool for thermal imprint process has been developed. In the system, polymer is assumed to be a visco-elastic body represented by the generalized Maxwell model. We experimentally measured visco-elastic properties of a polymer material and derived parameters used in the simulation tool. Using the same polymer material, we performed imprint experiments to examine time and temperature dependent polymer deformation. Comparing the polymer deformations in simulated results with those in experiments, we confirmed that the developed simulation tool and the measured material parameters were useful for analysis of thermal imprint process.
UR - https://www.scopus.com/pages/publications/77950881829
U2 - 10.1109/PORTABLE-POLYTRONIC.2008.4681299
DO - 10.1109/PORTABLE-POLYTRONIC.2008.4681299
M3 - 会议稿件
AN - SCOPUS:77950881829
SN - 9781424421411
T3 - PORTABLE-POLYTRONIC 2008 - 2nd IEEE International Interdisciplinary Conference on Portable Information Devices and the 2008 7th IEEE Conference on Polymers and Adhesives in Microelectronics and Photon
BT - PORTABLE-POLYTRONIC 2008 - 2nd IEEE International Interdisciplinary Conference on Portable Information Devices and the 2008 7th IEEE Conf. Polymers and Adhesives in Microelectronics and Photonics
T2 - 2nd IEEE International Interdisciplinary Conference on Portable Information Devices and the 2008 7th IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics, PORTABLE-POLYTRONIC 2008
Y2 - 17 August 2008 through 20 August 2008
ER -