Abstract
The flow field and temperature distribution of free molecular micro-electro-thermal resist jet (FMMR) were studied with DSMC-FVM coupled method. The characteristics of the flow field were analyzed. The results show that the adopted DSMC-FVM coupled method is appropriate and necessary for flow and temperature field simulation in FMMR.
| Original language | English |
|---|---|
| Pages (from-to) | 1205-1207 |
| Number of pages | 3 |
| Journal | Kung Cheng Je Wu Li Hsueh Pao/Journal of Engineering Thermophysics |
| Volume | 29 |
| Issue number | 7 |
| State | Published - Jul 2008 |
Keywords
- DSMC-FVM coupled method
- Micro nozzle
- Multiscale computation
- Pressure boundary conditions
- Unstructured-grid
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