Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint

Y. Onishi; H. Takagi; Y. Hirai; M. Takahashi; R. Maeda; T. Tanabe; Y. Iriye

doi:10.1109/IMNC.2007.4456294

Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint

Y. Onishi
, H. Takagi
, Y. Hirai
, M. Takahashi
, R. Maeda
, T. Tanabe
, Y. Iriye

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Numerical and experimental analyses of an intermittent line-and-space pattern in thermal NIL were carried out. Both numerical and experimental results showed same tendencies and explained characteristic phenomena which never appear in continuous line-and-space patterning cases. We believe that numerical simulations with more accurate material properties and finer finite element meshes have possibilities to agree with experiments better enough for practical use.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	442-443
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456294
State	Published - 2007
Externally published	Yes
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 5 Nov 2007 → 8 Nov 2007

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	5/11/07 → 8/11/07

Access to Document

10.1109/IMNC.2007.4456294

Cite this

Onishi, Y., Takagi, H., Hirai, Y., Takahashi, M., Maeda, R., Tanabe, T., & Iriye, Y. (2007). Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 442-443). Article 4456294 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456294

Onishi, Y. ; Takagi, H. ; Hirai, Y. et al. / Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 442-443 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{0a546a2d3965436da7eeae539b5fb421,

title = "Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint",

abstract = "Numerical and experimental analyses of an intermittent line-and-space pattern in thermal NIL were carried out. Both numerical and experimental results showed same tendencies and explained characteristic phenomena which never appear in continuous line-and-space patterning cases. We believe that numerical simulations with more accurate material properties and finer finite element meshes have possibilities to agree with experiments better enough for practical use.",

author = "Y. Onishi and H. Takagi and Y. Hirai and M. Takahashi and R. Maeda and T. Tanabe and Y. Iriye",

year = "2007",

doi = "10.1109/IMNC.2007.4456294",

language = "英语",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "442--443",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Onishi, Y, Takagi, H, Hirai, Y, Takahashi, M, Maeda, R, Tanabe, T & Iriye, Y 2007, Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456294, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 442-443, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 5/11/07. https://doi.org/10.1109/IMNC.2007.4456294

Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint. / Onishi, Y.; Takagi, H.; Hirai, Y. et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 442-443 4456294 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Onishi, Y.

AU - Takagi, H.

AU - Hirai, Y.

AU - Takahashi, M.

AU - Maeda, R.

AU - Tanabe, T.

AU - Iriye, Y.

PY - 2007

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N2 - Numerical and experimental analyses of an intermittent line-and-space pattern in thermal NIL were carried out. Both numerical and experimental results showed same tendencies and explained characteristic phenomena which never appear in continuous line-and-space patterning cases. We believe that numerical simulations with more accurate material properties and finer finite element meshes have possibilities to agree with experiments better enough for practical use.

AB - Numerical and experimental analyses of an intermittent line-and-space pattern in thermal NIL were carried out. Both numerical and experimental results showed same tendencies and explained characteristic phenomena which never appear in continuous line-and-space patterning cases. We believe that numerical simulations with more accurate material properties and finer finite element meshes have possibilities to agree with experiments better enough for practical use.

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M3 - 会议稿件

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SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

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BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Onishi Y, Takagi H, Hirai Y, Takahashi M, Maeda R, Tanabe T et al. Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 442-443. 4456294. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456294

Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint

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