@inproceedings{95666ca816994f4f9ec79d98983d1595,
title = "Novel MEMS oscillator using in-plane disk resonator with sensing platform and its mass sensing characteristics",
abstract = "We developed a new disk resonator which has high quality factor, highly efficient mass detection ability, and area-effective layout. High quality factor was achieved by minimizing support loss using nodal-point position control on the structural design. Sensing platform in the center hole provides wide and high-sensitive mass detection area. We also developed an oscillation circuit using impedance transform circuit which is suitable to MEMS resonators with high motional impedance. Toluene gas detection was demonstrated using this oscillator.",
keywords = "Annular disk resonator, MEMS Oscillator, Mass sensing, Motional impedance, Sensing platform",
author = "M. Konno and T. Ikehara and S. Murakami and R. Maeda and M. Kimura and T. Fukawa and T. Mihara",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969670",
language = "英语",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "518--521",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}