Note: High temperature pressure sensor for petroleum well based on silicon over insulator

Bian Tian; Hanyue Liu; Ning Yang; Yulong Zhao

doi:10.1063/1.4937355

Note: High temperature pressure sensor for petroleum well based on silicon over insulator

Bian Tian
, Hanyue Liu
, Ning Yang
, Yulong Zhao

School of Mechanical Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Review article › peer-review

13 Scopus citations

Abstract

In order to meet the requirements in petroleum well, a novel structure of high temperature pressure sensor based on the silicon over insulator (SOI) technology is proposed in this paper. The SOI sensor chip is bonded with a glass ring by electrostatic bonding. By controlling the inner diameter of the glass ring, the size of the circle membrane is obtained precisely. And the detailed parameters of the structure are established through analysis. Then, the sensor is fabricated. The test results show that this type sensor has high sensitivity and accuracy. It is able to measure at the temperature up to 180 °C and the measuring range is 60 MPa. Moreover, the results we got are closer to the actual situation.

Original language	English
Article number	126103
Journal	Review of Scientific Instruments
Volume	86
Issue number	12
DOIs	https://doi.org/10.1063/1.4937355
State	Published - 1 Dec 2015

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title = "Note: High temperature pressure sensor for petroleum well based on silicon over insulator",

abstract = "In order to meet the requirements in petroleum well, a novel structure of high temperature pressure sensor based on the silicon over insulator (SOI) technology is proposed in this paper. The SOI sensor chip is bonded with a glass ring by electrostatic bonding. By controlling the inner diameter of the glass ring, the size of the circle membrane is obtained precisely. And the detailed parameters of the structure are established through analysis. Then, the sensor is fabricated. The test results show that this type sensor has high sensitivity and accuracy. It is able to measure at the temperature up to 180 °C and the measuring range is 60 MPa. Moreover, the results we got are closer to the actual situation.",

author = "Bian Tian and Hanyue Liu and Ning Yang and Yulong Zhao",

note = "Publisher Copyright: {\textcopyright} 2015 AIP Publishing LLC.",

year = "2015",

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day = "1",

doi = "10.1063/1.4937355",

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T2 - High temperature pressure sensor for petroleum well based on silicon over insulator

AU - Tian, Bian

AU - Liu, Hanyue

AU - Yang, Ning

AU - Zhao, Yulong

PY - 2015/12/1

Y1 - 2015/12/1

N2 - In order to meet the requirements in petroleum well, a novel structure of high temperature pressure sensor based on the silicon over insulator (SOI) technology is proposed in this paper. The SOI sensor chip is bonded with a glass ring by electrostatic bonding. By controlling the inner diameter of the glass ring, the size of the circle membrane is obtained precisely. And the detailed parameters of the structure are established through analysis. Then, the sensor is fabricated. The test results show that this type sensor has high sensitivity and accuracy. It is able to measure at the temperature up to 180 °C and the measuring range is 60 MPa. Moreover, the results we got are closer to the actual situation.

AB - In order to meet the requirements in petroleum well, a novel structure of high temperature pressure sensor based on the silicon over insulator (SOI) technology is proposed in this paper. The SOI sensor chip is bonded with a glass ring by electrostatic bonding. By controlling the inner diameter of the glass ring, the size of the circle membrane is obtained precisely. And the detailed parameters of the structure are established through analysis. Then, the sensor is fabricated. The test results show that this type sensor has high sensitivity and accuracy. It is able to measure at the temperature up to 180 °C and the measuring range is 60 MPa. Moreover, the results we got are closer to the actual situation.

UR - https://www.scopus.com/pages/publications/84951780023

U2 - 10.1063/1.4937355

DO - 10.1063/1.4937355

M3 - 文献综述

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SN - 0034-6748

VL - 86

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 12

M1 - 126103

ER -

Note: High temperature pressure sensor for petroleum well based on silicon over insulator

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