Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

Minghui Zhao; Yonghong Qi; Xiaopeng Zhang; Bo Li; Zhuangde Jiang; Xueyong Wei

doi:10.1109/JSEN.2021.3128534

Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

Minghui Zhao
, Yonghong Qi
, Xiaopeng Zhang
, Bo Li
, Zhuangde Jiang
, Xueyong Wei

Xi'an Jiaotong University
Northwest Institute of Nuclear Technology
CAS - Changchun Institute of Optics Fine Mechanics and Physics

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Pérot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 μ g/√Hz@1 Hz to 330 ng/√Hz@1 Hz.

Original language	English
Pages (from-to)	365-372
Number of pages	8
Journal	IEEE Sensors Journal
Volume	22
Issue number	1
DOIs	https://doi.org/10.1109/JSEN.2021.3128534
State	Published - 1 Jan 2022

Keywords

Fabry-Pérot interference
MEMS seismic accelerometer
noise equivalent acceleration

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10.1109/JSEN.2021.3128534

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title = "Noise Analysis and Performance Improvement of a MEMS Fabry-P{\'e}rot Seismic Accelerometer",

abstract = "MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-P{\'e}rot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 μ g/√Hz@1 Hz to 330 ng/√Hz@1 Hz.",

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AU - Zhao, Minghui

AU - Qi, Yonghong

AU - Zhang, Xiaopeng

AU - Li, Bo

AU - Jiang, Zhuangde

AU - Wei, Xueyong

PY - 2022/1/1

Y1 - 2022/1/1

N2 - MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Pérot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 μ g/√Hz@1 Hz to 330 ng/√Hz@1 Hz.

AB - MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Pérot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 μ g/√Hz@1 Hz to 330 ng/√Hz@1 Hz.

KW - Fabry-Pérot interference

KW - MEMS seismic accelerometer

KW - noise equivalent acceleration

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M3 - 文章

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Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

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Keywords

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