New microheater based on ion implantation technology for micro chamber chip

A new microheater embedded in silicon substrate was designed to reduce the power consumption of micro chamber polymerase chain reaction (PCR) chip. The microheater was comprised of heating resistors which were strip-shaped in one axis and fabricated by ion implantation technology. The thermal cycling characteristics of the microheater were studied by using the developed thermal cycling control system, including power consumption, temperature rising speed under different powers, and the effects of sample on temperature and power consumption. The experimental results show that the average temperature rising speed can reach 4.7°C/s under the heating power of 1.6 W, and the power consumption at 90°C is only about 0.67 W. Finally, the thermal cycling profile was achieved. Therefore, the microheater based on ion implantation technology can effectively reduce power consumption and well meet the requirements of micro chamber PCR chip.