New functional ceramic deposition method for MEMS

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Abstract

The PZT, NiZn-ferrite and TiO2 ceramic films with thickness range of 1 to 100 μm were deposited by focusing a jet flow of ultra-fine particles of these materials on a substrate. According to the XRD observation, the as-deposited films have randomly oriented polycrystalline structure, what is the same as the raw material crystal structure of the ultra-fine particles. Ferroelectricity of the as-deposited PZT film was observed.

Original languageEnglish
Pages (from-to)331-337
Number of pages7
JournalFerroelectrics
Volume224
Issue number1-4
DOIs
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1998 4th European Conference on Applications of Polar Dielectrics (ECAPD-IV) - Montreaux, Switz
Duration: 24 Aug 199827 Aug 1998

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