Abstract
The PZT, NiZn-ferrite and TiO2 ceramic films with thickness range of 1 to 100 μm were deposited by focusing a jet flow of ultra-fine particles of these materials on a substrate. According to the XRD observation, the as-deposited films have randomly oriented polycrystalline structure, what is the same as the raw material crystal structure of the ultra-fine particles. Ferroelectricity of the as-deposited PZT film was observed.
| Original language | English |
|---|---|
| Pages (from-to) | 331-337 |
| Number of pages | 7 |
| Journal | Ferroelectrics |
| Volume | 224 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1998 4th European Conference on Applications of Polar Dielectrics (ECAPD-IV) - Montreaux, Switz Duration: 24 Aug 1998 → 27 Aug 1998 |