TY - JOUR
T1 - Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection
AU - Lu, Yu
AU - Kai, Lin
AU - Chen, Caiyi
AU - Yang, Qing
AU - Meng, Yizhao
AU - Liu, Yi
AU - Cheng, Yang
AU - Hou, Xun
AU - Chen, Feng
N1 - Publisher Copyright:
© The Authors. Published by SPIE and CLP under a Creative Commons Attribution 4.0 International License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
PY - 2022/11/1
Y1 - 2022/11/1
N2 - Nanochannel structures with a feature size deeply under the diffraction limit and a high aspect ratio hold huge biomedical significance, which is especially challenging to be realized on hard and brittle materials, such as silica, diamond, and sapphire. By simultaneously depositing the pulse energy on the surface and inside the sample, nanochannels with the smallest feature size of 18 nm (∼1∕30λ) and more than 200 aspect ratios are achieved inside silica, the mechanism of which can be concluded as the surface assisting material ejection effect. Both the experimental and theoretical results prove that the coaction of the superficial “hot domain” and internal hot domain dominates the generation of the nanochannels, which gives new insights into the laser-material interacting mechanisms and potentially promotes the corresponding application fields.
AB - Nanochannel structures with a feature size deeply under the diffraction limit and a high aspect ratio hold huge biomedical significance, which is especially challenging to be realized on hard and brittle materials, such as silica, diamond, and sapphire. By simultaneously depositing the pulse energy on the surface and inside the sample, nanochannels with the smallest feature size of 18 nm (∼1∕30λ) and more than 200 aspect ratios are achieved inside silica, the mechanism of which can be concluded as the surface assisting material ejection effect. Both the experimental and theoretical results prove that the coaction of the superficial “hot domain” and internal hot domain dominates the generation of the nanochannels, which gives new insights into the laser-material interacting mechanisms and potentially promotes the corresponding application fields.
KW - femtosecond laser direct writing
KW - nanochannels
KW - spatially shaping
KW - surface assisting material ejection
UR - https://www.scopus.com/pages/publications/105002221200
U2 - 10.1117/1.APN.1.2.026004
DO - 10.1117/1.APN.1.2.026004
M3 - 文章
AN - SCOPUS:105002221200
SN - 2791-1519
VL - 1
JO - Advanced Photonics Nexus
JF - Advanced Photonics Nexus
IS - 2
M1 - 026004
ER -