@inproceedings{348992cdcb5b44db95ad7f205a5776a7,
title = "Nano-scale sample-plate fabrication by AFM-tip induced local oxidation",
abstract = "Components of nano-scale measuring system and the present research situation of nano-scale sample-plate fabrication are introduced. With offline calibration, the measured images of an instrument can be calibrated with that of a standard sample-plate whose critical dimensions have been traced to optical wavelength. Three kinds of nano-scale length sample-plates are fabricated nowadays, such as: 1) graduated length scales; 2) grid plates; 3) long gage blocks. The principle and techniques of nano-scale sample-plate fabrication by AFM-tip induced local oxidation are presented. Mechanism of AFM tip-induced oxidation on Si substrate is a highly local electrochemical anodization. This local anodic oxidation is subject to the strength of the electric field applied, ambient humidity, the writing speed, the radius curvature of the tip and the thickness of the oxide, etc. So the rate and lateral resolution (grid pitch) of the oxidation process are controllable. The alternative substrate of the nano-scale sample-plate is briefly discussed.",
keywords = "Grid plate, Nano-scale sample-plate, Nanolithography, Offline calibration, Online calibration, Tip-induced anodization oxidation",
author = "Weixuan Jing and Zhuangde Jiang",
year = "2002",
language = "英语",
isbn = "7560317685",
series = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
pages = "4/033--4/036",
editor = "K.-C. Fan and F. Yetai and K-.C. Fan and F. Yetai",
booktitle = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
note = "Proceedings of the International Symposium on Precision Mechanical Measurement ; Conference date: 11-08-2002 Through 16-08-2002",
}