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Nano-carbon field electron emission films synthesized by a confined-plasma chemical vapor deposition system

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1 Scopus citations

Abstract

In this study, we developed a novel plasma CVD system that can generate a uniform long confined plasma column which enables us to grow the thin films on entire surface (360 0) of the long-wire or rod substrates. By means of this kind of confined plasma CVD (CPCVD), nano-carbon films have been successfully deposited on the 1000-mm-long metal wires. The as-deposited nano-carbon films present the efficient field electron emission properties.

Original languageEnglish
Title of host publicationTechnical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012Om
Pages326-327
Number of pages2
DOIs
StatePublished - 2012
Externally publishedYes
Event25th International Vacuum Nanoelectronics Conference, IVNC 2012 - Jeju, Korea, Republic of
Duration: 9 Jul 201213 Jul 2012

Publication series

NameTechnical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012

Conference

Conference25th International Vacuum Nanoelectronics Conference, IVNC 2012
Country/TerritoryKorea, Republic of
CityJeju
Period9/07/1213/07/12

Keywords

  • CPCVD
  • field emission
  • nano-carbon
  • wire substrate

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