Multifunctional TiO ₂ /ormosils organicinorganic hybrid films derived by a sol-gel process for photonics and UV nanoimprint applications

Multifunctional TiO ₂ /ormosils organic-inorganic hybrid films that contain azobenzene and photosensitive groups are prepared by combining a low temperature sol-gel process and a spin-coating technique. The optical waveguide and the structural properties of the hybrid films are characterized and investigated respectively by different techniques. The photo-responsive properties of the hybrid films are induced by a photo-irradiation under UV light at a wavelength of 365 nm. Finally, micro-lens arrays are built in the hybrid films by using a UV soft imprint technique. These results indicate that the as prepared hybrid films with multifunctional photonic properties are promising candidates for integrated optics and photonic applications, which would allow the direct integration onto a single chip of the optical micro-elements and the optical data storage and optical switching devices.