TY - JOUR
T1 - Mould-free skin-inspired robust and sensitive flexible pressure sensors with hierarchical microstructures
AU - Ma, Chao
AU - Xu, Dong
AU - Liu, Wenfeng
AU - Dong, Tianyu
AU - Li, Sheng Tao
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/10
Y1 - 2021/10
N2 - Flexible microscopic pressure sensors are important to the emerging fields of intelligent robots and advanced healthcare. However, common microstructured pressure sensors often require sophisticatedmould and/or material preparation, and yield limited pressure sensing performances. In this letter, we report a facile approach to design a scalable and stretchable mould-free sensitive layer with a unique hierarchical microstructure. Inspired by natural skin, a sensitive layer with interdigitated electrodes is utilized to constructed into resistive pressure sensors, which are able to robustly detect the pressure variations with high sensitivity in a wide dynamic range (about 33 kPa-1 below 5 kPa, more than 0.6 kPa-1 under 108 kPa), also deliver low hysteresis (within 8%), rapid response (less than 48 ms), and ultralow operation voltage (10 μV). We illustrate that such self-patterned highperformance pressure sensors can be applied to convert the pressure stimulus into spike-like signals in both lowandmedium- pressure regimes, and are being able to clearly reveal the details of human pulse wave.
AB - Flexible microscopic pressure sensors are important to the emerging fields of intelligent robots and advanced healthcare. However, common microstructured pressure sensors often require sophisticatedmould and/or material preparation, and yield limited pressure sensing performances. In this letter, we report a facile approach to design a scalable and stretchable mould-free sensitive layer with a unique hierarchical microstructure. Inspired by natural skin, a sensitive layer with interdigitated electrodes is utilized to constructed into resistive pressure sensors, which are able to robustly detect the pressure variations with high sensitivity in a wide dynamic range (about 33 kPa-1 below 5 kPa, more than 0.6 kPa-1 under 108 kPa), also deliver low hysteresis (within 8%), rapid response (less than 48 ms), and ultralow operation voltage (10 μV). We illustrate that such self-patterned highperformance pressure sensors can be applied to convert the pressure stimulus into spike-like signals in both lowandmedium- pressure regimes, and are being able to clearly reveal the details of human pulse wave.
KW - Electronic-skin
KW - Hierarchical microstructures
KW - Mould-free
KW - Pressure sensors
UR - https://www.scopus.com/pages/publications/85116365280
U2 - 10.1109/LED.2021.3109035
DO - 10.1109/LED.2021.3109035
M3 - 文章
AN - SCOPUS:85116365280
SN - 0741-3106
VL - 42
SP - 1536
EP - 1539
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
IS - 10
ER -