Mould-free skin-inspired robust and sensitive flexible pressure sensors with hierarchical microstructures

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13 Scopus citations

Abstract

Flexible microscopic pressure sensors are important to the emerging fields of intelligent robots and advanced healthcare. However, common microstructured pressure sensors often require sophisticatedmould and/or material preparation, and yield limited pressure sensing performances. In this letter, we report a facile approach to design a scalable and stretchable mould-free sensitive layer with a unique hierarchical microstructure. Inspired by natural skin, a sensitive layer with interdigitated electrodes is utilized to constructed into resistive pressure sensors, which are able to robustly detect the pressure variations with high sensitivity in a wide dynamic range (about 33 kPa-1 below 5 kPa, more than 0.6 kPa-1 under 108 kPa), also deliver low hysteresis (within 8%), rapid response (less than 48 ms), and ultralow operation voltage (10 μV). We illustrate that such self-patterned highperformance pressure sensors can be applied to convert the pressure stimulus into spike-like signals in both lowandmedium- pressure regimes, and are being able to clearly reveal the details of human pulse wave.

Original languageEnglish
Pages (from-to)1536-1539
Number of pages4
JournalIEEE Electron Device Letters
Volume42
Issue number10
DOIs
StatePublished - Oct 2021

Keywords

  • Electronic-skin
  • Hierarchical microstructures
  • Mould-free
  • Pressure sensors

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