Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter

  • Kenji Kozuka
  • , Dong F. Wang
  • , Tsuyoshi Ikehara
  • , Keisuke Chatani
  • , Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. Our recent work (NEMS 2012) focused on enhancing the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results were discussed from view point of vibration characteristic by comparing experimental results with analytical ones, without a small mass perturbation. The present study however try to apply the consequent amplitude change to resonating-based flow meter with a simplified system of beam shaped 2-resonator array (AlN/SCS). The possible application has been analytically discussed from view point of vibration characteristic with a small mass perturbation.

Original languageEnglish
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages1198-1201
Number of pages4
DOIs
StatePublished - 2013
Externally publishedYes
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: 7 Apr 201310 Apr 2013

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Conference

Conference8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Country/TerritoryChina
CitySuzhou
Period7/04/1310/04/13

Keywords

  • Coupling overhang
  • Eigenstate shift (amplitude change)
  • Mechanically-coupled resonator array
  • Small mass perturbation
  • Vibration mode localization
  • resonating flow meter

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