Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

M. Miyake; J. F. Scott; X. J. Lou; F. D. Morrison; S. Motoyama; T. Tatsuta; O. Tsuji

doi:10.1109/ISAF.2007.4393160

Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

M. Miyake
, J. F. Scott
, X. J. Lou
, F. D. Morrison
, S. Motoyama
, T. Tatsuta
, O. Tsuji

University of Cambridge
Samco Inc.
University of St Andrews

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Pb(Zr,Ti)O₃ (PZT) thin films and nanotube were prepared on SiO₂/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm ². The step coverage was 59% on the side wall and 79% on the bottom wall.

Original language	English
Title of host publication	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages	38-40
Number of pages	3
DOIs	https://doi.org/10.1109/ISAF.2007.4393160
State	Published - 2007
Externally published	Yes
Event	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan Duration: 27 May 2007 → 31 May 2007

Publication series

Name	IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Country/Territory	Japan
City	Nara-city
Period	27/05/07 → 31/05/07

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10.1109/ISAF.2007.4393160

Cite this

Miyake, M., Scott, J. F., Lou, X. J., Morrison, F. D., Motoyama, S., Tatsuta, T., & Tsuji, O. (2007). Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 38-40). Article 4393160 (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393160

@inproceedings{2f5e07bade804f5ea9ca7f4cf25c08ad,

title = "Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes",

abstract = "Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm 2. The step coverage was 59\% on the side wall and 79\% on the bottom wall.",

author = "M. Miyake and Scott, \{J. F.\} and Lou, \{X. J.\} and Morrison, \{F. D.\} and S. Motoyama and T. Tatsuta and O. Tsuji",

year = "2007",

doi = "10.1109/ISAF.2007.4393160",

language = "英语",

isbn = "1424413338",

series = "IEEE International Symposium on Applications of Ferroelectrics",

pages = "38--40",

booktitle = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF",

note = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF ; Conference date: 27-05-2007 Through 31-05-2007",

}

Miyake, M, Scott, JF, Lou, XJ, Morrison, FD, Motoyama, S, Tatsuta, T & Tsuji, O 2007, Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. in 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393160, IEEE International Symposium on Applications of Ferroelectrics, pp. 38-40, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, Japan, 27/05/07. https://doi.org/10.1109/ISAF.2007.4393160

Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. / Miyake, M.; Scott, J. F.; Lou, X. J. et al.
2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 38-40 4393160 (IEEE International Symposium on Applications of Ferroelectrics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

AU - Miyake, M.

AU - Scott, J. F.

AU - Lou, X. J.

AU - Morrison, F. D.

AU - Motoyama, S.

AU - Tatsuta, T.

AU - Tsuji, O.

PY - 2007

Y1 - 2007

N2 - Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm 2. The step coverage was 59% on the side wall and 79% on the bottom wall.

AB - Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm 2. The step coverage was 59% on the side wall and 79% on the bottom wall.

UR - https://www.scopus.com/pages/publications/51349146669

U2 - 10.1109/ISAF.2007.4393160

DO - 10.1109/ISAF.2007.4393160

M3 - 会议稿件

AN - SCOPUS:51349146669

SN - 1424413338

SN - 9781424413331

T3 - IEEE International Symposium on Applications of Ferroelectrics

SP - 38

EP - 40

BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

Y2 - 27 May 2007 through 31 May 2007

ER -

Miyake M, Scott JF, Lou XJ, Morrison FD, Motoyama S, Tatsuta T et al. Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 38-40. 4393160. (IEEE International Symposium on Applications of Ferroelectrics). doi: 10.1109/ISAF.2007.4393160

Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

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