Microstructure, mechanical and tribological properties of Mo-V-N films by reactive magnetron sputtering

Vanadium and molybdenum can form the lubricating oxide films at high temperatures, which provided a foundation for the development of self-lubricating films. In this paper, the MoN, VN films and the Mo-V-N films with different molybdenum‑vanadium atom ratios have been prepared by reactive magnetron sputtering to study their tribological properties. The results showed that the Mo-V-N film with the vanadium content of 22 at.% has the highest hardness and the best wear resistance, as well as the average friction coefficient is as low as 0.27 at 700 °C. The results show that the Mo-V-N film with 22 at.% V content has the highest hardness, the best wear resistance and the average friction coefficient as low as 0.27 at 700 °C. The optimal molybdenum‑vanadium atom ratio in Mo-V-N film is favorable for the formation of lubricious glaze layers composed mainly of V₂O₅ and MoO₃ on the worn surface at 700 °C, which has better synergistic lubrication effect.