Microstructure and electric properties of (Pb 0.8Ca 0.2)TiO 3 thin films prepared by rf magnetron sputtering with a seed layer

M. Fu; Q. G. Chi; X. Wang; Y. Chen; Q. Q. Lei

doi:10.1016/j.matlet.2012.04.044

Microstructure and electric properties of (Pb _0.8Ca _0.2)TiO ₃ thin films prepared by rf magnetron sputtering with a seed layer

M. Fu
, Q. G. Chi
, X. Wang
, Y. Chen
, Q. Q. Lei

Northeast Forestry University
Harbin University of Science and Technology

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

The tetragonal (Pb _0.8Ca _0.2)TiO ₃ (PCT) thin films with and without Pb _0.8La _0.1Ca _0.1Ti _0.975O ₃ (PLCT) seed layer were deposited on the Pt(111)/Ti/SiO ₂/Si substrates by rf magnetron sputtering. The influence of seed layer on microstructures and electric properties of the PCT films was investigated, it was found that the PCT film without seed layer showed random orientation, while the film with seed layer exhibited strong (100) orientation. The PCT thin film with 14 nm-thick PLCT seed layer displayed enhanced electrical properties such as a large pyroelectric coefficient (256 μC/m ² K) and a low leakage current density (J < 2 × 10 ^{- 5} A/cm ²) at room temperature. The resulting high figure-of-merit (F _d = 173 μC/m ² K) indicates the highly oriented film good candidate for pyroelectric thin-film devices.

Original language	English
Pages (from-to)	20-22
Number of pages	3
Journal	Materials Letters
Volume	80
DOIs	https://doi.org/10.1016/j.matlet.2012.04.044
State	Published - 1 Aug 2012
Externally published	Yes

Keywords

Leakage current
Pyroelectric properties
Texture
Thin films

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10.1016/j.matlet.2012.04.044

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@article{8e91d97be3514561966b25e2e875e02d,

title = "Microstructure and electric properties of (Pb 0.8Ca 0.2)TiO 3 thin films prepared by rf magnetron sputtering with a seed layer",

abstract = "The tetragonal (Pb 0.8Ca 0.2)TiO 3 (PCT) thin films with and without Pb 0.8La 0.1Ca 0.1Ti 0.975O 3 (PLCT) seed layer were deposited on the Pt(111)/Ti/SiO 2/Si substrates by rf magnetron sputtering. The influence of seed layer on microstructures and electric properties of the PCT films was investigated, it was found that the PCT film without seed layer showed random orientation, while the film with seed layer exhibited strong (100) orientation. The PCT thin film with 14 nm-thick PLCT seed layer displayed enhanced electrical properties such as a large pyroelectric coefficient (256 μC/m 2 K) and a low leakage current density (J < 2 × 10 - 5 A/cm 2) at room temperature. The resulting high figure-of-merit (F d = 173 μC/m 2 K) indicates the highly oriented film good candidate for pyroelectric thin-film devices.",

keywords = "Leakage current, Pyroelectric properties, Texture, Thin films",

author = "M. Fu and Chi, \{Q. G.\} and X. Wang and Y. Chen and Lei, \{Q. Q.\}",

year = "2012",

month = aug,

day = "1",

doi = "10.1016/j.matlet.2012.04.044",

language = "英语",

volume = "80",

pages = "20--22",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Microstructure and electric properties of (Pb 0.8Ca 0.2)TiO 3 thin films prepared by rf magnetron sputtering with a seed layer

AU - Fu, M.

AU - Chi, Q. G.

AU - Wang, X.

AU - Chen, Y.

AU - Lei, Q. Q.

PY - 2012/8/1

Y1 - 2012/8/1

N2 - The tetragonal (Pb 0.8Ca 0.2)TiO 3 (PCT) thin films with and without Pb 0.8La 0.1Ca 0.1Ti 0.975O 3 (PLCT) seed layer were deposited on the Pt(111)/Ti/SiO 2/Si substrates by rf magnetron sputtering. The influence of seed layer on microstructures and electric properties of the PCT films was investigated, it was found that the PCT film without seed layer showed random orientation, while the film with seed layer exhibited strong (100) orientation. The PCT thin film with 14 nm-thick PLCT seed layer displayed enhanced electrical properties such as a large pyroelectric coefficient (256 μC/m 2 K) and a low leakage current density (J < 2 × 10 - 5 A/cm 2) at room temperature. The resulting high figure-of-merit (F d = 173 μC/m 2 K) indicates the highly oriented film good candidate for pyroelectric thin-film devices.

AB - The tetragonal (Pb 0.8Ca 0.2)TiO 3 (PCT) thin films with and without Pb 0.8La 0.1Ca 0.1Ti 0.975O 3 (PLCT) seed layer were deposited on the Pt(111)/Ti/SiO 2/Si substrates by rf magnetron sputtering. The influence of seed layer on microstructures and electric properties of the PCT films was investigated, it was found that the PCT film without seed layer showed random orientation, while the film with seed layer exhibited strong (100) orientation. The PCT thin film with 14 nm-thick PLCT seed layer displayed enhanced electrical properties such as a large pyroelectric coefficient (256 μC/m 2 K) and a low leakage current density (J < 2 × 10 - 5 A/cm 2) at room temperature. The resulting high figure-of-merit (F d = 173 μC/m 2 K) indicates the highly oriented film good candidate for pyroelectric thin-film devices.

KW - Leakage current

KW - Pyroelectric properties

KW - Texture

KW - Thin films

UR - https://www.scopus.com/pages/publications/84861608559

U2 - 10.1016/j.matlet.2012.04.044

DO - 10.1016/j.matlet.2012.04.044

M3 - 文章

AN - SCOPUS:84861608559

SN - 0167-577X

VL - 80

SP - 20

EP - 22

JO - Materials Letters

JF - Materials Letters

ER -

Microstructure and electric properties of (Pb _0.8Ca _0.2)TiO ₃ thin films prepared by rf magnetron sputtering with a seed layer

Abstract

Keywords

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