Micromachined silicon disk resonator transduced by piezoelectric lead zirconate titanate thin films

Jian Lu; Tadatomo Suga; Yi Zhang; Toshihiro Itoh; Ryutaro Maeda; Takashi Mihara

doi:10.1143/JJAP.49.06GN17

Micromachined silicon disk resonator transduced by piezoelectric lead zirconate titanate thin films

Jian Lu
, Tadatomo Suga
, Yi Zhang
, Toshihiro Itoh
, Ryutaro Maeda
, Takashi Mihara

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

Piezoelectrically transduced microelectromechanical system (MEMS) devices are promising candidates for use in distributed wireless sensor networks (WSN) to their low driving voltage and various sensing actuation capabilities. In this paper, we present a micromachined silicon disk resonator with on-disk piezoelectric lead zirconate titanate (PZT) thin films as both the actuator and sensor for human healthcare and safety applications. The resonator shows preferred system integration compatibilities, and the negative effects of the PZT-electrode stacks were compressed. A high quality factor was achieved both in air (∼1;300) and under vacuum (∼5;000). The effects of through-hole and other parameters on device sensitivity were examined and discussed in this paper.

Original language	English
Pages (from-to)	06GN171-06GN174
Journal	Japanese Journal of Applied Physics
Volume	49
Issue number	6 PART 2
DOIs	https://doi.org/10.1143/JJAP.49.06GN17
State	Published - Jun 2010
Externally published	Yes

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title = "Micromachined silicon disk resonator transduced by piezoelectric lead zirconate titanate thin films",

abstract = "Piezoelectrically transduced microelectromechanical system (MEMS) devices are promising candidates for use in distributed wireless sensor networks (WSN) to their low driving voltage and various sensing actuation capabilities. In this paper, we present a micromachined silicon disk resonator with on-disk piezoelectric lead zirconate titanate (PZT) thin films as both the actuator and sensor for human healthcare and safety applications. The resonator shows preferred system integration compatibilities, and the negative effects of the PZT-electrode stacks were compressed. A high quality factor was achieved both in air (∼1;300) and under vacuum (∼5;000). The effects of through-hole and other parameters on device sensitivity were examined and discussed in this paper.",

author = "Jian Lu and Tadatomo Suga and Yi Zhang and Toshihiro Itoh and Ryutaro Maeda and Takashi Mihara",

year = "2010",

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doi = "10.1143/JJAP.49.06GN17",

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T1 - Micromachined silicon disk resonator transduced by piezoelectric lead zirconate titanate thin films

AU - Lu, Jian

AU - Suga, Tadatomo

AU - Zhang, Yi

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

AU - Mihara, Takashi

PY - 2010/6

Y1 - 2010/6

N2 - Piezoelectrically transduced microelectromechanical system (MEMS) devices are promising candidates for use in distributed wireless sensor networks (WSN) to their low driving voltage and various sensing actuation capabilities. In this paper, we present a micromachined silicon disk resonator with on-disk piezoelectric lead zirconate titanate (PZT) thin films as both the actuator and sensor for human healthcare and safety applications. The resonator shows preferred system integration compatibilities, and the negative effects of the PZT-electrode stacks were compressed. A high quality factor was achieved both in air (∼1;300) and under vacuum (∼5;000). The effects of through-hole and other parameters on device sensitivity were examined and discussed in this paper.

AB - Piezoelectrically transduced microelectromechanical system (MEMS) devices are promising candidates for use in distributed wireless sensor networks (WSN) to their low driving voltage and various sensing actuation capabilities. In this paper, we present a micromachined silicon disk resonator with on-disk piezoelectric lead zirconate titanate (PZT) thin films as both the actuator and sensor for human healthcare and safety applications. The resonator shows preferred system integration compatibilities, and the negative effects of the PZT-electrode stacks were compressed. A high quality factor was achieved both in air (∼1;300) and under vacuum (∼5;000). The effects of through-hole and other parameters on device sensitivity were examined and discussed in this paper.

UR - https://www.scopus.com/pages/publications/77955324032

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DO - 10.1143/JJAP.49.06GN17

M3 - 文章

AN - SCOPUS:77955324032

SN - 0021-4922

VL - 49

SP - 06GN171-06GN174

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 6 PART 2

ER -

Micromachined silicon disk resonator transduced by piezoelectric lead zirconate titanate thin films

Abstract

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