Abstract
An electrostatically actuated microgripper was designed with improvd force output and gripping motion. A model of the S-shaped flexible fingers was solved by the finite element method for analysis of the structure, modal and electric field. A high aspect ratio microgripper with S-shaped flexible fingers was fabricated by using silicon bulk micromachining. A gripper finger an equivalent length of 5.47 mm was then released. The electro-conductive gripper fingers were connected to ground for releasing the electric charge on the finger surface. Continuous S-shaped flexures in the fingers reduce the gripping arm stiffness, solve the contradiction between the huge elastic modulus and the small surface electrostatic force and increase the force output of the microgripper.
| Original language | English |
|---|---|
| Pages (from-to) | 655-658 |
| Number of pages | 4 |
| Journal | Qinghua Daxue Xuebao/Journal of Tsinghua University |
| Volume | 43 |
| Issue number | 5 |
| State | Published - May 2003 |
| Externally published | Yes |
Keywords
- Finite element method
- Microgripper
- Silicon bulk micromachining