Microfabricated magnetic field sensor based on electrodeposited giant magnetoresistive (Cu/Co)x multilayer

  • Heng Zhang
  • , W. Wang
  • , E. Ma
  • , Thomas Moffat

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

A giant magnetoresistive (GMR) magnetic sensor (Cu/Co)x based on superlattice multilayers has been designed, fabricated, and tested. The sensor shows a magnetoresistance ratio of ΔR/R=4% at a 3000 Gauss magnetic field. Fabrication of the microsensor was based on computer-controlled electrodeposition of GMR thin films and lithography patterning technology.

Original languageEnglish
Title of host publicationProceedings of the International Symposium on Test and Measurement
PublisherInt Acad Publ
Pages1115-1119
Number of pages5
ISBN (Print)7800034410
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1999 3rd International Symposium on Test and Measurement, ISTM-99 - Xi'an, China
Duration: 2 Jun 19994 Jun 1999

Publication series

NameProceedings of the International Symposium on Test and Measurement

Conference

ConferenceProceedings of the 1999 3rd International Symposium on Test and Measurement, ISTM-99
CityXi'an, China
Period2/06/994/06/99

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