Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity

Xiangmeng Li; Jinyou Shao; Yucheng Ding; Hongmiao Tian

doi:10.1016/j.apsusc.2014.04.039

Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity

Xiangmeng Li
, Jinyou Shao
, Yucheng Ding
, Hongmiao Tian

School of Mechanical Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

A unique microbowl-arrayed surface demonstrates highly adhesive hydrophobicity similar to a rose-petal. Such a textured surface is generated by electron beam lithography on negative-tone SU-8 resist with X-Y cross-lines scanning. The microbowl array patterned surface possesses an advancing contact angle of 160° and a contact angle hysteresis of 90°, and it is capable of holding a 50 μl aqueous droplet as positioned perpendicularly. The wetting properties of adhesive hydrophobicity can be tuned by varying the exposure dosage in EBL as well as the thickness of the fluorocarbon deposition, both of which can change the curvature of microbowl array with submicron-ridges. Therefore, the contact state on such microbowl-arrayed surfaces can be varied from Cassie-Baxter's to Wenzel's model.

Original language	English
Pages (from-to)	365-371
Number of pages	7
Journal	Applied Surface Science
Volume	307
DOIs	https://doi.org/10.1016/j.apsusc.2014.04.039
State	Published - 15 Jul 2014

Keywords

Adhesive hydrophobicity
Electron beam lithography
Microbowl array
Negative-tone SU-8

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10.1016/j.apsusc.2014.04.039

Cite this

@article{11fa98439e9f45c898b4c287ba751293,

title = "Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity",

abstract = "A unique microbowl-arrayed surface demonstrates highly adhesive hydrophobicity similar to a rose-petal. Such a textured surface is generated by electron beam lithography on negative-tone SU-8 resist with X-Y cross-lines scanning. The microbowl array patterned surface possesses an advancing contact angle of 160° and a contact angle hysteresis of 90°, and it is capable of holding a 50 μl aqueous droplet as positioned perpendicularly. The wetting properties of adhesive hydrophobicity can be tuned by varying the exposure dosage in EBL as well as the thickness of the fluorocarbon deposition, both of which can change the curvature of microbowl array with submicron-ridges. Therefore, the contact state on such microbowl-arrayed surfaces can be varied from Cassie-Baxter's to Wenzel's model.",

keywords = "Adhesive hydrophobicity, Electron beam lithography, Microbowl array, Negative-tone SU-8",

author = "Xiangmeng Li and Jinyou Shao and Yucheng Ding and Hongmiao Tian",

year = "2014",

month = jul,

day = "15",

doi = "10.1016/j.apsusc.2014.04.039",

language = "英语",

volume = "307",

pages = "365--371",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity

AU - Li, Xiangmeng

AU - Shao, Jinyou

AU - Ding, Yucheng

AU - Tian, Hongmiao

PY - 2014/7/15

Y1 - 2014/7/15

N2 - A unique microbowl-arrayed surface demonstrates highly adhesive hydrophobicity similar to a rose-petal. Such a textured surface is generated by electron beam lithography on negative-tone SU-8 resist with X-Y cross-lines scanning. The microbowl array patterned surface possesses an advancing contact angle of 160° and a contact angle hysteresis of 90°, and it is capable of holding a 50 μl aqueous droplet as positioned perpendicularly. The wetting properties of adhesive hydrophobicity can be tuned by varying the exposure dosage in EBL as well as the thickness of the fluorocarbon deposition, both of which can change the curvature of microbowl array with submicron-ridges. Therefore, the contact state on such microbowl-arrayed surfaces can be varied from Cassie-Baxter's to Wenzel's model.

AB - A unique microbowl-arrayed surface demonstrates highly adhesive hydrophobicity similar to a rose-petal. Such a textured surface is generated by electron beam lithography on negative-tone SU-8 resist with X-Y cross-lines scanning. The microbowl array patterned surface possesses an advancing contact angle of 160° and a contact angle hysteresis of 90°, and it is capable of holding a 50 μl aqueous droplet as positioned perpendicularly. The wetting properties of adhesive hydrophobicity can be tuned by varying the exposure dosage in EBL as well as the thickness of the fluorocarbon deposition, both of which can change the curvature of microbowl array with submicron-ridges. Therefore, the contact state on such microbowl-arrayed surfaces can be varied from Cassie-Baxter's to Wenzel's model.

KW - Adhesive hydrophobicity

KW - Electron beam lithography

KW - Microbowl array

KW - Negative-tone SU-8

UR - https://www.scopus.com/pages/publications/84901358360

U2 - 10.1016/j.apsusc.2014.04.039

DO - 10.1016/j.apsusc.2014.04.039

M3 - 文章

AN - SCOPUS:84901358360

SN - 0169-4332

VL - 307

SP - 365

EP - 371

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity

Abstract

Keywords

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